Design of Higher-k and More Stable Rare Earth Oxides as Gate Dielectrics for Advanced CMOS Devices
1987 ◽
Vol 48
(C7)
◽
pp. C7-611-C7-615
Keyword(s):
2003 ◽
Vol 142
(3)
◽
pp. 697-701
◽
Keyword(s):