scholarly journals Copper Nitride Nanowire Arrays—Comparison of Synthetic Approaches

Materials ◽  
2021 ◽  
Vol 14 (3) ◽  
pp. 603 ◽  
Author(s):  
Aleksandra Scigala ◽  
Edward Szłyk ◽  
Tomasz Rerek ◽  
Marek Wiśniewski ◽  
Lukasz Skowronski ◽  
...  

Copper nitride nanowire arrays were synthesized by an ammonolysis reaction of copper oxide precursors grown on copper surfaces in an ammonia solution. The starting Cu films were deposited on a silicon substrate using two different methods: thermal evaporation (30 nm thickness) and electroplating (2 μm thickness). The grown CuO or CuO/Cu(OH)2 architectures were studied in regard to morphology and size, using electron microscopy methods (SEM, TEM). The final shape and composition of the structures were mostly affected by the concentration of the ammonia solution and time of the immersion. Needle-shaped 2–3 μm long nanostructures were formed from the electrodeposited copper films placed in a 0.033 M NH3 solution for 48 h, whereas for the copper films obtained by physical vapor deposition (PVD), well-aligned nano-needles were obtained after 3 h. The phase composition of the films was studied by X-ray diffraction (XRD) and selected area electron diffraction (SAED) analysis, indicating a presence of CuO and Cu(OH)2, as well as Cu residues. Therefore, in order to obtain a pure oxide film, the samples were thermally treated at 120–180 °C, after which the morphology of the structures remained unchanged. In the final stage of this study, Cu3N nanostructures were obtained by an ammonolysis reaction at 310 °C and studied by SEM, TEM, XRD, and spectroscopic methods. The fabricated PVD-derived coatings were also analyzed using a spectroscopic ellipsometry method, in order to calculate dielectric function, band gap and film thickness.

1993 ◽  
Vol 8 (8) ◽  
pp. 1845-1852 ◽  
Author(s):  
M.D. Thouless ◽  
J. Gupta ◽  
J.M.E. Harper

The reliability of integrated-circuit wiring depends strongly on the development and relaxation of stresses that promote void and hillock formation. In this paper an analysis based on existing models of creep is presented that predicts the stresses developed in thin blanket films of copper on Si wafers subjected to thermal cycling. The results are portrayed on deformation-mechanism maps that identify the dominant mechanisms expected to operate during thermal cycling. These predictions are compared with temperature-ramped and isothermal stress measurements for a 1 μm-thick sputtered Cu film in the temperature range 25–450 °C. The models successfully predict both the rate of stress relaxation when the film is held at a constant temperature and the stress-temperature hysteresis generated during thermal cycling. For 1 μm-thick Cu films cycled in the temperature range 25–450 °C, the deformation maps indicate that grain-boundary diffusion controls the stress relief at higher temperatures (>300 °C) when only a low stress can be sustained in the films, power-law creep is important at intermediate temperatures and determines the maximum compressive stress, and that if yield by dislocation glide (low-temperature plasticity) occurs, it will do so only at the lowest temperatures (<100 °C). This last mechanism did not appear to be operating in the film studied for this project.


1996 ◽  
Vol 436 ◽  
Author(s):  
R.-M. Keller ◽  
W. Sigle ◽  
S. P. Baker ◽  
O. Kraft ◽  
E. Arzt

AbstractIn-situ transmission electron microscopy (TEM) was performed to study grain growth and dislocation motion during temperature cycles of Cu films with and without a cap layer. In addition, the substrate curvature method was employed to determine the corresponding stresstemperature curves from room temperature up to 600°C. The results of the in-situ TEM investigations provide insight into the microstructural evolution which occurs during the stress measurements. Grain growth occurred continuously throughout the first heating cycle in both cases. The evolution of dislocation structure observed in TEM supports an explanation of the stress evolution in both capped and uncapped films in terms of dislocation effects.


Micromachines ◽  
2018 ◽  
Vol 9 (11) ◽  
pp. 601
Author(s):  
Yahua Hu ◽  
Mu Gu ◽  
Xiaolin Liu ◽  
Juannan Zhang ◽  
Shiming Huang ◽  
...  

Uniform Lu2O3:Eu3+ nanowire arrays were successfully prepared by the sol-gel process using anodic aluminum oxide (AAO) templates. The as-synthesized nanowires are homogeneous, highly ordered, and dense and have a uniform diameter of ~300 nm defined by the AAO templates. The X-ray diffraction and selected area electron diffraction results show that the Lu2O3:Eu3+ nanowires have a polycrystalline cubic structure, and the crystallite size of the Lu2O3:Eu3+ nanowires is confined by the AAO template. The nanowires within the AAO template showed good photoluminescence and X-ray-excited optical luminescence performances for Lu2O3:Eu3+. The emission peaks were attributed to the 5D0 → 7FJ transitions of Eu3+ (J = 0, 1, 2, 3).


1986 ◽  
Vol 40 (7) ◽  
pp. 1062-1065 ◽  
Author(s):  
Teiki Iwaoka ◽  
Peter R. Griffiths ◽  
John T. Kitasako ◽  
Gill G. Geesey

Techniques for coating thin copper films on the surface of cylindrical germanium internal reflection elements are described. These films were then characterized in an aqueous environment. The expected exponential relationship between the depth of penetration of the evanescent wave into water and the thickness of the copper film was verified experimentally. The stability of vacuum-deposited copper coatings was strong enough that the internal reflection element could be exposed to an aqueous solution of a polysaccharide for more than 40 h. The weak adhesion of polysaccharides to copper surfaces was studied spectroscopically.


1994 ◽  
Vol 356 ◽  
Author(s):  
R.-M. Keller ◽  
S. Bader ◽  
R. P. Vinci ◽  
E. Arzt

AbstractThe substrate curvature technique was employed to study the mechanical properties of 0.6 μm and 1.0 μm Cu films capped with a 50 nm thick Si3N4 layer and to compare them with the mechanical properties of uncapped Cu films. The microstructures of these films were also investigated. Grain growth, diffusional creep and dislocation processes are impeded by the cap layer. This is evident in the form of high stresses at high temperatures on heating and at low temperatures on cooling. At intermediate temperatures on heating and cooling, stress plateaus a relatively low stresses exist. This can be explained by the so-called Bauschinger effect. A film thickness dependence of the stresses in the film could not be observed for capped Cu films.


2007 ◽  
Vol 353-358 ◽  
pp. 116-119 ◽  
Author(s):  
Bin Zhang ◽  
K.H. Sun ◽  
Jun Gong ◽  
Chao Sun ◽  
Zhong Guang Wang ◽  
...  

Fatigue tests of nanometer-thick Cu films as deposited and annealed in vacuum were conducted under constant load ranges at room temperature. Fatigue strengths of the Cu films, which is defined as the critical load range being able to cause crack initiation within 106 cycles, are determined. The experimental results show that fatigue strength increases with decreasing film thickness. Fatigue cracking behaviors were characterized by electron microscope. It is also found that fatigue cracking resistance is dependent on film thickness and increases with decreasing film thickness. Size effects on fatigue properties of the nanometer-thick Cu films are discussed.


2001 ◽  
Vol 695 ◽  
Author(s):  
Alex A. Volinsky ◽  
Meike Hauschildt ◽  
Joseph B. Vella ◽  
N.V. Edwards ◽  
Rich Gregory ◽  
...  

ABSTRACTCopper films of different thicknesses between 0.2 and 2 microns were electroplated on adhesion-promoting TiW and Ta barrier layers on <100> single crystal 6-inch silicon wafers. The residual stress was measured after each processing step using a wafer curvature technique employing Stoney's equation. Large gradients in the stress distributions were found across each wafer. Controlled Cu grain growth was achieved by annealing films at 350 C for 3 minutes in high vacuum. Annealing increased the average tensile residual stress by about 200 MPa for all the films, which is in agreement with stress-temperature cycling measurements.After aging for 1 year wafer stress mapping showed that the stress gradients in the copper films were alleviated. No stress discrepancies between the copper on Ta and TiW barrier layers could be found. However, X-ray pole figure analysis showed broad and shifted (111) texture in films on a TiW underlayer, whereas the (111) texture in Cu films on Ta is sharp and centered.


1999 ◽  
Vol 564 ◽  
Author(s):  
R. Faust ◽  
Q. Jiang

AbstractThe effect of various barrier materials on the microstructure of electroplated Copper films was investigated. Analysis of the Cu was performed at the as-deposited, room temperature stabilized, and annealed states. It shows that the barrier material can have a dramatic effect on the properties of electroplated Cu.


2006 ◽  
Vol 21 (6) ◽  
pp. 1512-1518 ◽  
Author(s):  
Dongwen Gan ◽  
Paul S. Ho ◽  
Yaoyu Pang ◽  
Rui Huang ◽  
Jihperng Leu ◽  
...  

The present study investigated the effect of passivation on the kinetics of interfacial mass transport by measuring stress relaxation in electroplated Cu films with four different cap layers: SiN, SiC, SiCN, and a Co metal cap. Stress curves measured under thermal cycling showed different behaviors for the unpassivated and passivated Cu films, but were essentially indifferent for the films passivated with different cap layers. On the other hand, stress relaxation measured under an isothermal condition revealed clearly the effect of passivation, indicating that interface diffusion controls the kinetics of stress relaxation. The relaxation rates in the passivated Cu films were found to decrease in the order of SiC, SiCN, SiN, and metal caps. This correlates well with previous studies on the relationship between interfacial adhesion and electromigration. A kinetic model based on coupling of interface and grain-boundary diffusion was used to deduce the interface diffusivities and the corresponding activation energies.


1993 ◽  
Vol 313 ◽  
Author(s):  
D.P. Pappas ◽  
J.W. Glesener ◽  
V.G. Harris ◽  
J.J. Krebs ◽  
Y.U. Idzerda ◽  
...  

ABSTRACTThe growth of iron and copper films and multilayers on the (100) face of diamond has been achieved and studied by reflection high energy electron diffraction (RHEED), extended x-ray absorption fine structure (EXAFS), ferromagnetic resonance (FMR), and SQUID Magnetometry. RHEED and AES studies show that 2–3 atomic layers (AL) of Fe on C (100) forms a continuous film. The films as deposited at room temperature are disordered, and after a 350° C anneal displays a face-centered cubic structure. Subsequent layers of Cu on this epitaxial Fe film grow as an oriented, single crystal fee film. FMR and SQUID signals have been observed from the Fe films, showing that they are ferromagnetic.


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