scholarly journals Properties and Classification of Diamond-Like Carbon Films

Materials ◽  
2021 ◽  
Vol 14 (2) ◽  
pp. 315
Author(s):  
Naoto Ohtake ◽  
Masanori Hiratsuka ◽  
Kazuhiro Kanda ◽  
Hiroki Akasaka ◽  
Masanori Tsujioka ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Hydrogen Content ◽  
High Hardness ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Elastic Recoil ◽  
Amorphous Carbon Films ◽  
Ternary Diagrams ◽  
Detection Analysis

Diamond-like carbon (DLC) films have been extensively applied in industries owing to their excellent characteristics such as high hardness. In particular, there is a growing demand for their use as protective films for mechanical parts owing to their excellent wear resistance and low friction coefficient. DLC films have been deposited by various methods and many deviate from the DLC regions present in the ternary diagrams proposed for sp3 covalent carbon, sp2 covalent carbon, and hydrogen. Consequently, redefining the DLC region on ternary diagrams using DLC coatings for mechanical and electrical components is urgently required. Therefore, we investigate the sp3 ratio, hydrogen content, and other properties of 74 types of amorphous carbon films and present the classification of amorphous carbon films, including DLC. We measured the sp3 ratios and hydrogen content using near-edge X-ray absorption fine structure and Rutherford backscattering-elastic recoil detection analysis under unified conditions. Amorphous carbon films were widely found with nonuniform distribution. The number of carbon atoms in the sp3 covalent carbon without bonding with hydrogen and the logarithm of the hydrogen content were inversely proportional. Further, we elucidated the DLC regions on the ternary diagram, classified the amorphous carbon films, and summarized the characteristics and applications of each type of DLC.

Fluorinated Diamond-Like Carbon Films Produced by Plasma Immersion Ion Processing Technique

1999 ◽  
Vol 593 ◽  
Author(s):  
M. Hakovirta ◽  
D. H. Lee ◽  
X. M. He ◽  
M. Nastasi
Keyword(s):  
High Hardness ◽  
Processing Technique ◽  
Carbon Films ◽  
Glow Discharge Plasma ◽  
Diamond Like Carbon ◽  
Elastic Recoil ◽  
Dlc Coatings ◽  
Elastic Recoil Detection ◽  
Wetting Properties ◽  
Detection Analysis

ABSTRACTFluorinated diamond-like carbon (F-DLC) coatings were deposited on polished silicon substrates with plasma immersion ion processing (PIIP) technique. In the PIIP technique, pulsed glow discharge plasma from a mixture of acetylane and hexafluoroethane gases was used. Contact angle measurements were performed in order to see the un-wetting properties of the coatings. The film composition was measured with Rutherford Backscattering Spectroscopy (RBS) and Elastic Recoil Detection Analysis (ERDA) and the hardness was measured with a Nanoindenter® II. The results clearly show that the un-wetting properties and hardness are strongly dependent on the fluorine incorporation in the F-DLC coatings. With optimized gas ratio of acetylane and hexafluoroethane gases, a combination of extremely good un-wetting properties and high hardness was achieved.

scholarly journals Elastic Constants of Diamond-Like Carbon Films by Surface Brillouin Scattering

1999 ◽  
Vol 593 ◽  
Author(s):  
A.C. Ferrari ◽  
J. Robertson ◽  
R. Pastorelli ◽  
M.G. Beghi ◽  
C.E. Bottani
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Elastic Constants ◽  
Acoustic Waves ◽  
Brillouin Scattering ◽  
Surface Acoustic Waves ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon

ABSTRACTThe elastic constants of thin Diamond-Like Carbon (DLC) films supply important information, but their measurement is difficult. Standard nanoindentation does not directly measure the elastic constants and has strong limitations particularly in the case of hard thin films on softer substrates, such as tetrahedral amorphous carbon on Si. Surface acoustic waves provide a better mean to investigate elastic properties. Surface Brillouin scattering (SBS) intrinsically probes acoustic waves of the wavelength which is appropriate to test the properties of films in the tens to hundreds of nanometers thickness range. SBS can be used to derive all the isotropic elastic constants of hard-on-soft and soft-on-hard amorphous carbon films of different kinds, with thickness down to less than 10 nm. The results help to resolve the previous uncertainties in mechanical data. The Young's modulus of tetrahedral amorphous carbon (ta-C) turns out to be lower than that of diamond, while the moduli of hydrogenated ta-C (ta-C:H) are considerably lower than those of ta-C because of the weakening effect of C-H bonding.

scholarly journals Elastic Constants of Diamond Like Carbon Films by Surface Brillouin Scattering

1999 ◽  
Vol 594 ◽  
Author(s):  
A. C. Ferrari ◽  
J. Robertson ◽  
R. Pastorelli ◽  
M. G. Beghi ◽  
C. E. Bottani
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Elastic Constants ◽  
Acoustic Waves ◽  
Brillouin Scattering ◽  
Surface Acoustic Waves ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon

AbstractThe elastic constants of thin Diamond-Like Carbon (DLC) films supply important information, but their measurement is difficult. Standard nanoindentation does not directly measure the elastic constants and has strong limitations particularly in the case of hard thin films on softer substrates, such as tetrahedral amorphous carbon on Si. Surface acoustic waves provide a better mean to investigate elastic properties. Surface Brillouin scattering (SBS) intrinsically probes acoustic waves of the wavelength which is appropriate to test the properties of films in the tens to hundreds of nanometers thickness range. SBS can be used to derive all the isotropic elastic constants of hard-on-soft and soft-on-hard amorphous carbon films of different kinds, with thickness down to less than 10 nm. The results help to resolve the previous uncertainties in mechanical data. The Young's modulus of tetrahedral amorphous carbon (ta-C) turns out to be lower than that of diamond, while the moduli of hydrogenated ta-C (ta-C:H) are considerably lower than those of ta-C because of the weakening effect of C-H bonding.

Origin of low friction for amorphous carbon films with different hydrogen content in nitrogen atmosphere

2019 ◽  
Vol 140 ◽  
pp. 105853 ◽  
Author(s):  
Jingjing Wang ◽  
Xia Li ◽  
Guizhi Wu ◽  
Zhibin Lu ◽  
Guangan Zhang ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Hydrogen Content ◽  
Carbon Films ◽  
Nitrogen Atmosphere ◽  
Low Friction ◽  
Amorphous Carbon Films

Low Stress Tetrahedral Amorphous Carbon Films Prepared by Filtered Vacuum Arc Deposition

2005 ◽  
Vol 475-479 ◽  
pp. 3623-3626
Author(s):  
Xu Zhang ◽  
Hui Xing Zhang ◽  
Xiang Ying Wu ◽  
Tong He Zhang
Keyword(s):  
Wear Resistance ◽  
Amorphous Carbon ◽  
Carbon Film ◽  
High Hardness ◽  
Carbon Films ◽  
Vacuum Arc ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon ◽  
Vacuum Arc Deposition ◽  
Arc Deposition

The tetrahedral amorphous carbon films are attracting materials because of their properties similar to diamond, such as high hardness, resistivity, optical transparency, chemical inertness and low coefficient of friction. These properties make it ideal for wear resistance application on cutting tools, automotive component, aerospace components and orthopedic prosthesis etc. In this paper the structures, mechanical properties and wear resistance of the tetrahedral amorphous carbon films deposited on silicon under lower pulse bias voltage by filtered catholic vacuum arc deposition system have been investigated. The high quality tetrahedral amorphous carbon film has been obtained. The hardness and elastic modulus of the low stress tetrahedral amorphous carbon films are higher than 60Gpa and 380Gpa respectively determined by nano indentation tests. The friction performance of the tetrahedral amorphous carbon films was also studied by SRV tests, the results show: the tetrahedral amorphous carbon films have much lower wear rate than that of silicon substrate.

Tribological Propertees of Carbon thin Films Prepared by Plasma-Free Sputtering Method

1991 ◽  
Vol 239 ◽  
Author(s):  
T. Hirata ◽  
M. Naoe
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Magnetron Sputtering ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Amorphous Carbon Films ◽  
Magnetic Disk ◽  
Protective Layers ◽  
Better Than

ABSTRACTAmorphous “Diamond-like” carbon films were deposited on plasma-free substrates at low temperature by the Facing Targets Sputtering (FTS) method. Tribological characteristics determined by tap, scratch and slide tests were much better than those for amorphous carbon films deposited by the conventional Magnetron Sputtering (MS) method. Consequently, these films deposited by the FTS method were surely useful for protective layers in rigid magnetic disk.

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