scholarly journals On the Microstructure and Mechanical Properties of CrNx/Ag Multilayer Films Prepared by Magnetron Sputtering

Materials ◽  
2020 ◽  
Vol 13 (6) ◽  
pp. 1316
Author(s):  
Chunfu Hong ◽  
Ping He ◽  
Jun Tian ◽  
Fa Chang ◽  
Jianbo Wu ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Layer Thickness ◽  
Film Surface ◽  
Single Layer ◽  
Friction Reduction ◽  
Multilayer Coatings ◽  
X Ray Diffraction ◽  
Wear Performance ◽  
Transmission Electron ◽  
Nano Grains

CrNx/Ag multilayer coatings and a comparative CrNx single layer were deposited via reactive magnetron sputtering. In multilayer coatings, the thickness of each CrNx layer was constant at 60 nm, while that of the Ag layer was adjusted from 3 to 10 nm. Microstructure of the films was characterized by X-ray diffraction and transmission electron spectroscopy. The results suggest that the film containing 3 nm of Ag layer presents a nanocomposite structure comprising fine nano-grains and quasi-amorphous clusters. With Ag layer thickness reaching 4.5 nm and above, Ag grains coalesce to produce continuous an Ag layer and exhibit (111) preferential crystallization. Hardness of the films was detected by nanoindentation and it reveals that with increasing the Ag layer thickness, the hardness continuously decreases from 30.2 to 11.6 GPa. Wear performance of the films was examined by the ball-on-disk test at 500 °C. The result suggests that the out-diffusion of Ag towards film surface contributes to the friction reduction, while the wear performance of films depends on the thickness of the Ag layer.

scholarly journals Surface Stoichiometry and Depth Profile of Tix-CuyNz Thin Films Deposited by Magnetron Sputtering

Materials ◽  
2021 ◽  
Vol 14 (12) ◽  
pp. 3191
Author(s):  
Arun Kumar Mukhopadhyay ◽  
Avishek Roy ◽  
Gourab Bhattacharjee ◽  
Sadhan Chandra Das ◽  
Abhijit Majumdar ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Photoelectron Spectroscopy ◽  
Film Surface ◽  
Grazing Incidence ◽  
X Ray Diffraction ◽  
X Ray ◽  
Relative Composition ◽  
Transmission Electron ◽  
Deposited Film ◽  
Deposited Films

We report the surface stoichiometry of Tix-CuyNz thin film as a function of film depth. Films are deposited by high power impulse (HiPIMS) and DC magnetron sputtering (DCMS). The composition of Ti, Cu, and N in the deposited film is investigated by X-ray photoelectron spectroscopy (XPS). At a larger depth, the relative composition of Cu and Ti in the film is increased compared to the surface. The amount of adventitious carbon which is present on the film surface strongly decreases with film depth. Deposited films also contain a significant amount of oxygen whose origin is not fully clear. Grazing incidence X-ray diffraction (GIXD) shows a Cu3N phase on the surface, while transmission electron microscopy (TEM) indicates a polycrystalline structure and the presence of a Ti3CuN phase.

Enhanced hardness of CrAlSiN/W2N superlattice coatings deposited by direct current magnetron sputtering

2010 ◽  
Vol 25 (12) ◽  
pp. 2325-2329 ◽  
Author(s):  
Y.Z. Tsai ◽  
J.G. Duh
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Magnetron Sputtering ◽  
Multilayer Coatings ◽  
High Angle ◽  
X Ray Diffraction ◽  
X Ray ◽  
Superlattice Structure ◽  
Transmission Electron ◽  
Direct Current Magnetron Sputtering

CrAlSiN/W2N nanolayered coatings were prepared by direct current magnetron sputtering. The modulation periods of multilayer coatings were controlled in the range from 3 to 20 nm. From the low angle x-ray diffraction and high angle x-ray diffraction (XRD) satellite peaks, the superlattice structure of these coatings was evidenced. The modulation periods of multilayer coatings were obtained precisely by the low angle XRD and high angle XRD satellite peaks methods. The detailed layered structure was further investigated by high-resolution transmission electron microscopy. Because of the dense and smooth nanolayered microstructure, the CrAlSiN/W2N multilayer films exhibited excellent microhardness. With an appropriate modulation period of 8 nm, the hardness reached a maximum around 40 GPa. The hardness enhancement is attributed to the large lattice mismatch and strengthening of superlattice structure, which is confirmed by XRD and transmission electron microscopy.

Microstructural Characterization of Pt/Ti and RuO2 Electrodes on SiO2/Si Annealed in the Oxygen Ambient

1996 ◽  
Vol 433 ◽  
Author(s):  
Jeong Soo Lee ◽  
Hyun JA Kwon ◽  
Young Woo Jeong ◽  
Hyun HA Kim ◽  
Kyu HO Park ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Film Surface ◽  
Microstructural Characterization ◽  
Silicide Phase ◽  
X Ray Diffraction ◽  
Transmission Electron ◽  
Degree Of Oxidation ◽  
Thin Interlayer ◽  
Increasing Temperature

AbstractMicrostructures and interdiffusions of Pt/Ti/SiO2/Si and RuO2/SiO2/Si during annealing in O2 were investigated using x-ray diffraction, Auger electron spectroscopy, scanning electron microscopy, and transmission electron microscopy. The degree of oxidation and the interdiffusion of elements have remarkably increased with increasing temperature above 500 °C for the Pt/Ti/SiO2/Si case. The generation of Pt hillocks commenced at 500 °C. The Pt-silicide phase was also observed near the TiOx/SiO2 interface. The microstructural variations occurred to only a small amount for the RuO2/SiO2/Si case over the temperature range 300 – 700 °C. While there was no hillock formation, the RuO2 film surface was roughened by the thermal grooving phenomenon. A thin interlayer phase was found at the RuO2/SiO2 interface.

Superconductivity of Dc Reactive Magnetron Sputtered Epitaxial TiN/NbN Superlattices

1992 ◽  
Vol 275 ◽  
Author(s):  
M. Shinn ◽  
B. -S. Hong ◽  
S. A. Barnett
Keyword(s):  
Magnetic Field ◽  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Film Surface ◽  
Wavelength Dependence ◽  
Reactive Magnetron ◽  
Superconducting Transition ◽  
X Ray Diffraction ◽  
X Ray ◽  
Transmission Electron

ABSTRACTEpitaxial B1-structure TiN/NbN superlattices have been grown by reactive magnetron sputtering On MgO(001). X-ray diffraction and transmission electron microscopy (TEM) diffraction spectra exhibited up to nine orders of superlattice reflections, indicating that the superlattice interfaces were relatively sharp. TEM images also showed well-defined layers. The superlattice wavelength (∧) dependence of the superconducting transition temperature (Tc), critical Current density (Jc), and electrical resistivity (ρ) have been investigated. Tc values increased from 12 K to 17 K with increasing ∧. Jc in a magnetic field perpendicular to the film surface ranged from 104 to 106 A/cm2, increasing with increasing wavelength and decreasing with increasing applied magnetic field. Jc in a field parallel to the film surface was > 10 times higher, ≈ 107 A/cm2. The resistivity exhibited different ∧ dependencies in three different A ranges.

scholarly journals Perovskite CsPbBr3 Quantum Dots Prepared Using Discarded Lead–Acid Battery Recycled Waste

Energies ◽  
2019 ◽  
Vol 12 (6) ◽  
pp. 1117 ◽  
Author(s):  
Lung-Chien Chen ◽  
Ching-Ho Tien ◽  
Sin-Liang Ou ◽  
Kun-Yi Lee ◽  
Jianjun Tian ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Structural Characteristics ◽  
Film Surface ◽  
X Ray Diffraction ◽  
Transmission Electron ◽  
Storage Batteries ◽  
Recycled Waste ◽  
Cspbbr3 Quantum Dots ◽  
Very High ◽  
Lead Acid

Perovskite CsPbBr3 quantum dot (CsPbBr3-QD) recovery was performed using lead scrap from lead storage batteries. The perovskite CsPbBr3-QD characteristics were analyzed using different PbO/recycled PbO2 ratios. Scanning electron microscopy (SEM) was used to observe the film surface morphology and cross-section. High-resolution transmission electron microscopy (HRTEM) and X-ray diffraction (XRD) were used to observe the perovskite CsPbBr3-QDs’ structural characteristics. A photoluminescence (PL) measurement system was used to analyze the optical properties. The results show that lead scrap from lead–acid batteries as a material for perovskite CsPbBr3-QD production can be successfully synthesized. This saves material and also proves that recycling is valuable. The proposed approach is helpful for future material shortages and materials not easily accessible. Although the efficiency is not very high, this process will be purified using recycled lead in the future to achieve higher quantum yield.

Epitaxial Pd-Doped LaFeO3 Films Grown on (100) SrTiO3 by Pulsed Laser Deposition

2014 ◽  
Vol 936 ◽  
pp. 282-286
Author(s):  
Ying Wen Duan
Keyword(s):  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Film Surface ◽  
Laser Deposition ◽  
Structural Quality ◽  
Deposition Technique ◽  
X Ray Diffraction ◽  
Orientation Relationships ◽  
X Ray ◽  
Transmission Electron

Single-crystalline, epitaxial LaFeO3 films with 5 at. % substitution of Pd on the Fe site are grown on (100) SrTiO3 substrate by pulsed-laser deposition technique. The epitaxial orientation relationships are (110)[001]LFPO||(100)[001]STO. X-ray diffraction and transmission electron microscopy reveal that the LFPO films have high structural quality and an atomically sharp LFPO/STO interface. After reduction treatments of as-grown LFPO films, very little Pd escaped the LFPO lattice onto the film surface, the formed Pd (100) particles are oriented epitaxially, and parallel to the LFPO films surface.

Structural and Mechanical Properties of Multilayer TiN/CrN Coatings

2007 ◽  
Author(s):  
Manohar S. Konchady ◽  
Sergey Yarmolenko ◽  
Devdas M. Pai ◽  
Jag Sankar
Keyword(s):  
Mechanical Properties ◽  
Layer Thickness ◽  
Single Layer ◽  
Preferred Orientation ◽  
X Ray Diffraction ◽  
Unbalanced Magnetron Sputtering ◽  
Deposition Parameters ◽  
Unbalanced Magnetron ◽  
Crn Coatings ◽  
Modulation Wavelength

Multilayer and superlattice coatings of TiN/CrN coating are deposited on Si(100) substrate at different modulation wavelength by reactive unbalanced magnetron sputtering and characterized using X-ray diffraction, nanoindentation, AFM. Nano-roughness of films is in good correlation with hardness and modulus and this effect has been used for optimization of deposition parameters. Preliminary results have shown slightly better mechanical properties for multilayered TiN/CrN coatings compared to single layer TiN and CrN coatings. The XRD results have shown a preferred orientation in <100> direction for TiN/CrN multilayer coatings at modulation wavelengths below 80 nm. At 100 nm layer thickness, TiN revealed small amount of crystals with <111> orientation and their content significantly increases with increase in layer thickness while CrN layers only show preferred orientation of <100>. Multilayered coatings exhibit better mechanical properties due to presence of large number of interfaces which act as barrier to dislocations. Fracture toughness and tribological properties of these coatings are also expected to show significant improvement and the investigation in this area is under progress.

Multilayer Coatings for Focusing Hard X-ray Telescopes

1998 ◽  
Vol 551 ◽  
Author(s):  
A. Ivan ◽  
R. Bruni ◽  
K. Byun ◽  
J. Everett ◽  
P. Gorenstein ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Single Layer ◽  
Multilayer Coatings ◽  
Dc Magnetron Sputtering ◽  
Film Properties ◽  
Auger Analysis ◽  
Cross Sectional ◽  
X Ray ◽  
Specular Reflectivity

AbstractSeveral multilayer test coatings for hard X-ray telescopes were fabricated using DC magnetron sputtering. The process parameters were selected from a series of trials of single layer depositions. The samples were characterized using X-ray specular reflectivity scans, AFM, and cross-sectional TEM. Additional measurements (stylus profilometry, RBS, and Auger analysis) were used in the optimization of the deposition rate and of the thin film properties (density, composition, surface/interface microroughness). The X-ray reflectivity scans showed that the combinations of reflector and spacer materials tested so far (W/Si and W/C) are suited for graded d-spacing multilayer coatings that present a constant reflectivity bandpass up to 70 keV.

Evolution of Nanoindentation Hardness of Fe/Cu Nanometer-Scale Multilayers by Magnetron Sputtering

2008 ◽  
Vol 373-374 ◽  
pp. 104-107 ◽  
Author(s):  
J. Gao ◽  
Z.L. Wu ◽  
Z.P. Zhang ◽  
B.S. Cao ◽  
M.K. Lei
Keyword(s):  
Magnetron Sputtering ◽  
Nanometer Scale ◽  
X Ray Diffraction ◽  
Cross Sectional ◽  
X Ray ◽  
Transmission Electron ◽  
Modulus Difference ◽  
Nanoindentation Hardness ◽  
Modulation Wavelength ◽  
Peak Value

Fe/Cu nanometer-scale multilayers with nominal modulation wavelengths ranging from 5 to 40 nm are deposited by direct current magnetron sputtering on Si (100) substrates. Modulation structures of the multilayers are examined by small angle / wide angle x-ray diffraction (SA/WAXRD) and cross-sectional transmission electron microscopy (XTEM). Hardness of the multilayers is measured by using nanoindentation. All the multilayers have Fe (110) and Cu (111) textures. Interface coherency is observed in the multilayers with designed modulation wavelengths of 5 and 10 nm. The hardness increases firstly and then deceases with increasing the modulation wavelength, and reaches peak value of 7.29±0.29 GPa in the multilayers with nominal modulation wavelength of 10 nm. The evolution of the hardness of the mulitlayers is explained by interface width and modulus difference between sublayers.

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