scholarly journals The Influence of Plasma-Assisted Production and Milling Processes of DLC Flakes on Their Size, Composition and Chemical Structure

Materials ◽  
2020 ◽  
Vol 13 (5) ◽  
pp. 1209 ◽  
Author(s):  
Tomasz Kaźmierczak ◽  
Piotr Niedzielski ◽  
Witold Kaczorowski

Diamond-like carbon (DLC) flakes were produced using a dual-frequency method: microwave/radiofrequency plasma-assisted chemical vapour deposition (MW/RF PACVD) with the use of methane or its mixture with gases such as hydrogen, argon, oxygen or nitrogen. Their modification was performed using a planetary ball mill with and without a fluid: deionised water or methanol. Changes occurring in the morphology of flake surfaces were presented in pictures taken using a scanning electron microscope (SEM). Their composition and chemical structure were analysed using Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). The presented research results show that it is possible to control the size of flakes and their chemical structure. An increase in the C-C sp3 bond content in produced carbon-based materials is only possible by modifying DLC flakes during their production process by introducing oxygen or argon into the working chamber together with the carbon-carrying gas. In the processes of mechanical DLC flake modification, it is necessary to add fluid to limit the occurrence of graphitisation processes. The research conducted shows that methanol is best used for this purpose as its use results in a decrease in the percentage of C-C sp3 bonds as compared to the materials, before milling, of only 1.7%. A frequent problem both in the production of DLC flakes and during their mechanical modification is the introduction of additional elements into their structure. Admixing electrode materials from the plasma-chemical device (iron) or grinding beads (zirconium) to DLC flakes was observed in our studies. These processes can be limited by the appropriate selection of production conditions or by mechanical modifications.

Materials ◽  
2021 ◽  
Vol 14 (2) ◽  
pp. 459
Author(s):  
Zdeněk Krtouš ◽  
Lenka Hanyková ◽  
Ivan Krakovský ◽  
Daniil Nikitin ◽  
Pavel Pleskunov ◽  
...  

Plasma polymer films typically consist of very short fragments of the precursor molecules. That rather limits the applicability of most plasma polymerisation/plasma-enhanced chemical vapour deposition (PECVD) processes in cases where retention of longer molecular structures is desirable. Plasma-assisted vapour thermal deposition (PAVTD) circumvents this limitation by using a classical bulk polymer as a high molecular weight “precursor”. As a model polymer in this study, polylactic acid (PLA) has been used. The resulting PLA-like films were characterised mostly by X-ray photoelectron spectroscopy (XPS) and nuclear magnetic resonance (NMR) spectroscopy. The molecular structure of the films was found to be tunable in a broad range: from the structures very similar to bulk PLA polymer to structures that are more typical for films prepared using PECVD. In all cases, PLA-like groups are at least partially preserved. A simplified model of the PAVTD process chemistry was proposed and found to describe well the observed composition of the films. The structure of the PLA-like films demonstrates the ability of plasma-assisted vapour thermal deposition to bridge the typical gap between the classical and plasma polymers.


Coatings ◽  
2018 ◽  
Vol 8 (10) ◽  
pp. 369 ◽  
Author(s):  
Richard Krumpolec ◽  
Tomáš Homola ◽  
David Cameron ◽  
Josef Humlíček ◽  
Ondřej Caha ◽  
...  

Sequentially pulsed chemical vapour deposition was used to successfully deposit thin nanocrystalline films of copper(I) chloride using an atomic layer deposition system in order to investigate their application to UV optoelectronics. The films were deposited at 125 °C using [Bis(trimethylsilyl)acetylene](hexafluoroacetylacetonato)copper(I) as a Cu precursor and pyridine hydrochloride as a new Cl precursor. The films were analysed by XRD, X-ray photoelectron spectroscopy (XPS), SEM, photoluminescence, and spectroscopic reflectance. Capping layers of aluminium oxide were deposited in situ by ALD (atomic layer deposition) to avoid environmental degradation. The film adopted a polycrystalline zinc blende-structure. The main contaminants were found to be organic materials from the precursor. Photoluminescence showed the characteristic free and bound exciton emissions from CuCl and the characteristic exciton absorption peaks could also be detected by reflectance measurements.


2007 ◽  
Vol 336-338 ◽  
pp. 1776-1779
Author(s):  
Chong Mu Lee ◽  
Kyung Ha Kim

Diamond-like carbon (DLC) films have been deposited by radio frequency plasma enhanced chemical vapour deposition (rf-PECVD) with different Ar-CH4 mixtures. Nanocrystalline diamond films have been deposited by microwave plasma-enhanced chemical vapour deposition (MPCVD), using Ar-H2-CH4 mixtures. X-ray photoelectron spectroscopy (XPS) and nanotribological investigation (by scanning force microscopy) have been used to compare the mechanical properties and structures of these films. Highly orientated and non-orientated microcrystalline diamond films and MPCVD-produced amorphous carbon have also been studied by way of comparison. The diamond films exhibit a linear relationship between roughness and the coefficient of friction. The DLC and amorphous carbon have higher friction coefficients than the best performing diamond film, but may more easily be deposited as smooth coating. Possible applications for these various carbon-based films include microelectromechanical components, for which smooth, hard coatings are required.


1998 ◽  
Vol 76 (11) ◽  
pp. 1559-1563
Author(s):  
J Hugh Horton ◽  
Johann Rasmusson ◽  
Joseph G Shapter ◽  
Peter R Norton

The adsorption of the organometallic compounds bis(hexafluoroacetylacetonato)zinc(II) (Zn(hfac)2) and bis(hexafluoroacetylacetonato)nickel(II) (Ni(hfac)2) on the surface of Si(111)-7×7 were studied by a combination of scanning tunnelling microscopy (STM) and X-ray photoelectron spectroscopy (XPS). These compounds are analogues of the compound bis(hexafluoroacetylacetonato)copper(II), which is an important precursor for the chemical vapour deposition of copper that we have previously studied. Both XPS and STM results indicate that the Zn(hfac)2 is adsorbed intact on the surface, and remains intact on the surface at temperatures up to 300 K. The XPS shows a transition from a physisorbed state to a chemisorbed state at temperatures between 160 and 300 K. At higher temperatures Zn(hfac)2 decomposed to form Zn and fluorocarbon fragments. The metal component diffused into the substrate. The Ni(hfac)2 complex could not be successfully adsorbed on the Si surface: it was shown that this was due to decomposition of the molecule in the vapour phase, probably due to the higher temperatures needed to evaporate this relatively involatile compound.Key words: scanning tunnelling microscopy, chemical vapour deposition, zinc, copper.


2019 ◽  
Vol 10 ◽  
pp. 1443-1451
Author(s):  
Ivan Kundrata ◽  
Karol Fröhlich ◽  
Lubomír Vančo ◽  
Matej Mičušík ◽  
Julien Bachmann

Lithiated thin films are necessary for the fabrication of novel solid-state batteries, including the electrodes and solid electrolytes. Physical vapour deposition and chemical vapour deposition can be used to deposit lithiated films. However, the issue of conformality on non-planar substrates with large surface area makes them impractical for nanobatteries the capacity of which scales with surface area. Atomic layer deposition (ALD) avoids these issues and is able to deposit conformal films on 3D substrates. However, ALD is limited in the range of chemical reactions, due to the required volatility of the precursors. Moreover, relatively high temperatures are necessary (above 100 °C), which can be detrimental to electrode layers and substrates, for example to silicon into which the lithium can easily diffuse. In addition, several highly reactive precursors, such as Grignard reagents or n-butyllithium (BuLi) are only usable in solution. In theory, it is possible to use BuLi and water in solution to produce thin films of LiH. This theoretical reaction is self-saturating and, therefore, follows the principles of solution atomic layer deposition (sALD). Therefore, in this work the sALD technique and principles have been employed to experimentally prove the possibility of LiH deposition. The formation of homogeneous air-sensitive thin films, characterized by using ellipsometry, grazing incidence X-ray diffraction (GIXRD), in situ quartz crystal microbalance, and scanning electron microscopy, was observed. Lithium hydride diffraction peaks have been observed in as-deposited films by GIXRD. X-ray photoelectron spectroscopy and Auger spectroscopy analysis show the chemical identity of the decomposing air-sensitive films. Despite the air sensitivity of BuLi and LiH, making many standard measurements difficult, this work establishes the use of sALD to deposit LiH, a material inaccessible to conventional ALD, from precursors and at temperatures not suitable for conventional ALD.


Coatings ◽  
2018 ◽  
Vol 8 (11) ◽  
pp. 402 ◽  
Author(s):  
Andresa Baptista ◽  
Francisco Silva ◽  
Jacobo Porteiro ◽  
José Míguez ◽  
Gustavo Pinto

Physical vapour deposition (PVD) is a well-known technology that is widely used for the deposition of thin films regarding many demands, namely tribological behaviour improvement, optical enhancement, visual/esthetic upgrading, and many other fields, with a wide range of applications already being perfectly established. Machining tools are, probably, one of the most common applications of this deposition technique, sometimes used together with chemical vapour deposition (CVD) in order to increase their lifespan, decreasing friction, and improving thermal properties. However, the CVD process is carried out at higher temperatures, inducing higher stresses in the coatings and substrate, being used essentially only when the required coating needs to be deposited using this process. In order to improve this technique, several studies have been carried out optimizing the PVD technique by increasing plasma ionization, decreasing dark areas (zones where there is no deposition into the reactor), improving targets use, enhancing atomic bombardment efficiency, or even increasing the deposition rate and optimizing the selection of gases. These studies reveal a huge potential in changing parameters to improve thin film quality, increasing as well the adhesion to the substrate. However, the process of improving energy efficiency regarding the industrial context has not been studied as deeply as required. This study aims to proceed to a review regarding the improvements already studied in order to optimize the sputtering PVD process, trying to relate these improvements with the industrial requirements as a function of product development and market demand.


Materials ◽  
2021 ◽  
Vol 14 (19) ◽  
pp. 5490
Author(s):  
Nuria Jiménez-Arévalo ◽  
Eduardo Flores ◽  
Alessio Giampietri ◽  
Marco Sbroscia ◽  
Maria Grazia Betti ◽  
...  

Heterostructures formed by ultrathin borocarbonitride (BCN) layers grown on TiO2 nanoribbons were investigated as photoanodes for photoelectrochemical water splitting. TiO2 nanoribbons were obtained by thermal oxidation of TiS3 samples. Then, BCN layers were successfully grown by plasma enhanced chemical vapour deposition. The structure and the chemical composition of the starting TiS3, the TiO2 nanoribbons and the TiO2-BCN heterostructures were investigated by Raman spectroscopy, X-ray diffraction and X-ray photoelectron spectroscopy. Diffuse reflectance measurements showed a change in the gap from 0.94 eV (TiS3) to 3.3 eV (TiO2) after the thermal annealing of the starting material. Morphological characterizations, such as scanning electron microscopy and optical microscopy, show that the morphology of the samples was not affected by the change in the structure and composition. The obtained TiO2-BCN heterostructures were measured in a photoelectrochemical cell, showing an enhanced density of current under dark conditions and higher photocurrents when compared with TiO2. Finally, using electrochemical impedance spectroscopy, the flat band potential was determined to be equal in both TiO2 and TiO2-BCN samples, whereas the product of the dielectric constant and the density of donors was higher for TiO2-BCN.


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