scholarly journals Effect of Growth Temperature on the Structural and Electrical Properties of ZrO2 Films Fabricated by Atomic Layer Deposition Using a CpZr[N(CH3)2]3/C7H8 Cocktail Precursor

Materials ◽  
2018 ◽  
Vol 11 (3) ◽  
pp. 386 ◽  
Author(s):  
Jong-Ki An ◽  
Nak-Kwan Chung ◽  
Jin-Tae Kim ◽  
Sung-Ho Hahm ◽  
Geunsu Lee ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Atomic Layer Deposition ◽  
Growth Temperature ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Structural And Electrical Properties

Structural and electrical properties of ternary Ru–AlN thin films prepared by plasma-enhanced atomic layer deposition

2012 ◽  
Vol 47 (3) ◽  
pp. 790-793 ◽  
Author(s):  
Yu-Ri Shin ◽  
Won-Sub Kwack ◽  
Yun Chang Park ◽  
Jin-Hyock Kim ◽  
Seung-Yong Shin ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Structural And Electrical Properties

Structural and electrical properties of Ge-doped ZrO2 thin films grown by atomic layer deposition for high-k dielectrics

2018 ◽  
Vol 53 (21) ◽  
pp. 15237-15245 ◽  
Author(s):  
Bo-Eun Park ◽  
Yujin Lee ◽  
Il-Kwon Oh ◽  
Wontae Noh ◽  
Satoko Gatineau ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
High K ◽  
Structural And Electrical Properties

Structural and electrical properties of AlN thin films on GaN substrates grown by plasma enhanced-Atomic Layer Deposition

2019 ◽  
Vol 97 ◽  
pp. 35-39 ◽  
Author(s):  
Emanuela Schilirò ◽  
Filippo Giannazzo ◽  
Corrado Bongiorno ◽  
Salvatore Di Franco ◽  
Giuseppe Greco ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Structural And Electrical Properties
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