An Advanced Characterization Method for the Elastic Modulus of Nanoscale Thin-Films Using a High-Frequency Micromechanical Resonator
2009 ◽
Vol 42
(17)
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pp. 175506
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2007 ◽
Vol 316
(2)
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pp. e893-e895
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Keyword(s):
2011 ◽
Vol 495
◽
pp. 108-111
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