Anisotropic Strain on GaN Microdisks Grown by Plasma-Assisted Molecular Beam Epitaxy
Keyword(s):
Lattice relaxation on wurtzite GaN microdisks grown by plasma-assisted molecular beam epitaxy was systematically studied. The lattice constants of GaN microdisks were evaluated from high-resolution transmission electron microscopy, and the anisotropic strain was then analyzed by observing the microscopic atomic layers. We found that the vertical lattice strain along the c-axis followed a linear relationship, while the lateral lattice strain along the a-axis exhibited a quadratic deviation. The lattice mismatch is about 0.94% at the interface between the GaN microdisks and the γ-LiAlO2 substrate, which induces the anisotropic strain during epi-growth.
2016 ◽
Vol 30
(20)
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pp. 1650269
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1999 ◽
Vol 38
(Part 1, No. 8)
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pp. 4673-4675
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1995 ◽
Vol 150
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pp. 388-393
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