Large-Aperture Real-Time Compensated Collimating Wavefront Error Detection Method
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This paper proposes a real-time compensated pentaprism scanning wavefront detection method to achieve real-time compensation for scanning errors occurring during prism movement along a guide rail. The method is based on existing pentaprism scanning wavefront detection technology and it is realized by applying self-collimation-based three-dimensional error compensation. Using theoretical and data analyses of a detection experiment, the reliability of the optimized pentaprism scanning detection method is verified, thus effectively ensuring the reasonable estimation of the interferometry surface measurement uncertainty.
2013 ◽
Vol 748
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pp. 999-1002
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2017 ◽
Vol 11
(5)
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pp. 728-735
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2013 ◽
Vol 579-580
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pp. 630-636
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