scholarly journals Inspection and Classification of Semiconductor Wafer Surface Defects Using CNN Deep Learning Networks

2020 ◽  
Vol 10 (15) ◽  
pp. 5340
Author(s):  
Jong-Chih Chien ◽  
Ming-Tao Wu ◽  
Jiann-Der Lee

Due to advances in semiconductor processing technologies, each slice of a semiconductor is becoming denser and more complex, which can increase the number of surface defects. These defects should be caught early and correctly classified in order help identify the causes of these defects in the process and eventually help to improve the yield. In today’s semiconductor industry, visible surface defects are still being inspected manually, which may result in erroneous classification when the inspectors become tired or lose objectivity. This paper presents a vision-based machine-learning-based method to classify visible surface defects on semiconductor wafers. The proposed method uses deep learning convolutional neural networks to identify and classify four types of surface defects: center, local, random, and scrape. Experiments were performed to determine its accuracy. The experimental results showed that this method alone, without additional refinement, could reach a top accuracy in the range of 98% to 99%. Its performance in wafer-defect classification shows superior performance compared to other machine-learning methods investigated in the experiments.

Author(s):  
S. Priya ◽  
R. Annie Uthra

AbstractIn present times, data science become popular to support and improve decision-making process. Due to the accessibility of a wide application perspective of data streaming, class imbalance and concept drifting become crucial learning problems. The advent of deep learning (DL) models finds useful for the classification of concept drift in data streaming applications. This paper presents an effective class imbalance with concept drift detection (CIDD) using Adadelta optimizer-based deep neural networks (ADODNN), named CIDD-ADODNN model for the classification of highly imbalanced streaming data. The presented model involves four processes namely preprocessing, class imbalance handling, concept drift detection, and classification. The proposed model uses adaptive synthetic (ADASYN) technique for handling class imbalance data, which utilizes a weighted distribution for diverse minority class examples based on the level of difficulty in learning. Next, a drift detection technique called adaptive sliding window (ADWIN) is employed to detect the existence of the concept drift. Besides, ADODNN model is utilized for the classification processes. For increasing the classifier performance of the DNN model, ADO-based hyperparameter tuning process takes place to determine the optimal parameters of the DNN model. The performance of the presented model is evaluated using three streaming datasets namely intrusion detection (NSL KDDCup) dataset, Spam dataset, and Chess dataset. A detailed comparative results analysis takes place and the simulation results verified the superior performance of the presented model by obtaining a maximum accuracy of 0.9592, 0.9320, and 0.7646 on the applied KDDCup, Spam, and Chess dataset, respectively.


Cataract is a degenerative condition that, according to estimations, will rise globally. Even though there are various proposals about its diagnosis, there are remaining problems to be solved. This paper aims to identify the current situation of the recent investigations on cataract diagnosis using a framework to conduct the literature review with the intention of answering the following research questions: RQ1) Which are the existing methods for cataract diagnosis? RQ2) Which are the features considered for the diagnosis of cataracts? RQ3) Which is the existing classification when diagnosing cataracts? RQ4) And Which obstacles arise when diagnosing cataracts? Additionally, a cross-analysis of the results was made. The results showed that new research is required in: (1) the classification of “congenital cataract” and, (2) portable solutions, which are necessary to make cataract diagnoses easily and at a low cost.


2020 ◽  
Author(s):  
John T. Halloran ◽  
Gregor Urban ◽  
David Rocke ◽  
Pierre Baldi

AbstractSemi-supervised machine learning post-processors critically improve peptide identification of shot-gun proteomics data. Such post-processors accept the peptide-spectrum matches (PSMs) and feature vectors resulting from a database search, train a machine learning classifier, and recalibrate PSMs using the trained parameters, often yielding significantly more identified peptides across q-value thresholds. However, current state-of-the-art post-processors rely on shallow machine learning methods, such as support vector machines. In contrast, the powerful training capabilities of deep learning models have displayed superior performance to shallow models in an ever-growing number of other fields. In this work, we show that deep models significantly improve the recalibration of PSMs compared to the most accurate and widely-used post-processors, such as Percolator and PeptideProphet. Furthermore, we show that deep learning is able to adaptively analyze complex datasets and features for more accurate universal post-processing, leading to both improved Prosit analysis and markedly better recalibration of recently developed database-search functions.


Measurement ◽  
2015 ◽  
Vol 60 ◽  
pp. 222-230 ◽  
Author(s):  
Rajalingappaa Shanmugamani ◽  
Mohammad Sadique ◽  
B. Ramamoorthy

Author(s):  
Parvathi R. ◽  
Pattabiraman V.

This chapter proposes a hybrid method for classification of the objects based on deep neural network and a similarity-based search algorithm. The objects are pre-processed with external conditions. After pre-processing and training different deep learning networks with the object dataset, the authors compare the results to find the best model to improve the accuracy of the results based on the features of object images extracted from the feature vector layer of a neural network. RPFOREST (random projection forest) model is used to predict the approximate nearest images. ResNet50, InceptionV3, InceptionV4, and DenseNet169 models are trained with this dataset. A proposal for adaptive finetuning of the deep learning models by determining the number of layers required for finetuning with the help of the RPForest model is given, and this experiment is conducted using the Xception model.


2019 ◽  
Vol 9 (16) ◽  
pp. 3312 ◽  
Author(s):  
Zhu ◽  
Ge ◽  
Liu

In order to realize the non-destructive intelligent identification of weld surface defects, an intelligent recognition method based on deep learning is proposed, which is mainly formed by convolutional neural network (CNN) and forest random. First, the high-level features are automatically learned through the CNN. Random forest is trained with extracted high-level features to predict the classification results. Secondly, the weld surface defects images are collected and preprocessed by image enhancement and threshold segmentation. A database of weld surface defects is established using pre-processed images. Finally, comparative experiments are performed on the weld surface defects database. The results show that the accuracy of the method combined with CNN and random forest can reach 0.9875, and it also demonstrates the method is effective and practical.


The Analyst ◽  
2020 ◽  
Vol 145 (14) ◽  
pp. 4827-4835 ◽  
Author(s):  
Shizhuang Weng ◽  
Hecai Yuan ◽  
Xueyan Zhang ◽  
Pan Li ◽  
Ling Zheng ◽  
...  

Surface-enhanced Raman spectroscopy (SERS) based on machine learning methods has been applied in material analysis, biological detection, food safety, and intelligent analysis.


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