Precision Auto-Focusing Apparatus Based on Long-Working-Distance, Wide-Spectrum Microscope
Keyword(s):
A mirror-based Schwarzschild microscope with a wide spectrum and a long working distance was investigated to perform precise assemblage of detectors. We employed a gradient square method to construct the evaluation function for realizing accurate quantitative analysis of image defocusing. By imaging a resolution target that corresponded to 228 line pairs per mm, the validity and imaging ability of the system was proven. The results of repeated focusing tests yielded a standard deviation of 0.75 μm, which indicated high performance accuracy for the focusing system. The proposed system has potential applications in industrial inspection and focusing detection.
1990 ◽
Vol 48
(2)
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pp. 260-261
2020 ◽
Vol 16
(4)
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pp. 462-477
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2012 ◽
Vol 468-471
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pp. 534-537
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2021 ◽
2018 ◽
Vol 10
(47)
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pp. 40474-40490
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Keyword(s):
2013 ◽
Vol 448-453
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pp. 406-408