Microscope 3D Point Spread Function Evaluation Method on a Confirmed Object Plane Perpendicular to the Optical Axis

A point spread function evaluation method for a microscope on the object plane that is perpendicular to the optical axis is proposed. The measurement of the incident beam direction from the dual position-sensitive-detector (PSD)-based units, the determination of the object plane perpendicularity and the paraxial region, and evaluation methods for the point spread function (PSF) are presented and integrated into the proposed method. The experimental verification demonstrates that the proposed method can achieve a 3D PSF on the perpendicular object plane, as well as magnification, paraxial region evaluation, and confirmation for any microscopic system.