scholarly journals Measurement of Structural Loads Using a Novel MEMS Extrinsic Fabry–Perot Strain Sensor

2019 ◽  
Vol 10 (1) ◽  
pp. 18
Author(s):  
Yufang Bai ◽  
Jie Zeng ◽  
Jiwei Huang ◽  
Shaolong Zhong ◽  
Zhuming Cheng ◽  
...  
Keyword(s):  
Cavity Length ◽  
Microelectromechanical Systems ◽  
Strain Sensor ◽  
Force Sensor ◽  
Interference Signal ◽  
Finite Element Software ◽  
Fabry Perot ◽  
Mems Technology ◽  
Small Structure ◽  
High Repeatability

In this paper, microelectromechanical systems (MEMS) technology was used to fabricate a novel extrinsic fiber Fabry–Perot (EFFP) strain sensor; this fiber sensor is applied to measure load with higher precision for a small structure. The sensor cavity consists of two Fabry–Perot (FP) cavity mirrors that are processed by surface micromachining and then fused and spliced together by the silicon–glass anode bonding process. The initial cavity length can be strictly controlled, and the excellent parallelism of the two faces of the cavity results in a high interference fineness. Then, the anti-reflection coating process is applied to the sensor to improve the clarity of the interference signal with the cavity, with its wavelength working within the range of the C + L band. Next, the sensor placement is determined by the finite element software Nastran. Experimental results indicate that the sensor exhibits a good linear response (99.77%) to load changes and a high repeatability. Considering the strain transfer coefficient, the sensitivity for the tested structure load is as high as 35.6 pm/N. Due to the miniaturization, repeatability, and easy-to-batch production, the proposed sensor can be used as a reliable and practical force sensor.

scholarly journals Sensitivity-Enhanced Extrinsic Fabry–Perot Interferometric Fiber-Optic Microcavity Strain Sensor

Sensors ◽  
2019 ◽  
Vol 19 (19) ◽  
pp. 4097
Author(s):  
Zhibo Ma ◽  
Shaolei Cheng ◽  
Wanying Kou ◽  
Haibin Chen ◽  
Wei Wang ◽  
...  
Keyword(s):  
Sensitive Element ◽  
Cavity Length ◽  
Fiber Optic ◽  
Strain Sensor ◽  
Single Mode ◽  
Glass Capillary ◽  
Capillary Length ◽  
Uv Curable ◽  
Strain Measurements ◽  
Fabry Perot

This study presents an extrinsic Fabry–Perot interferometric (EFPI) fiber-optic strain sensor with a very short cavity. The sensor consists of two vertically cut standard single-mode fibers (SMFs) and a glass capillary with a length of several centimeters. The two SMFs penetrate into the glass capillary and are fixed at its two ends with the use of ultraviolet (UV) curable adhesives. Based on the use of the lengthy glass capillary sensitive element, the strain sensitivity can be greatly enhanced. Experiments showed that the microcavity EPFI strain sensor with initial cavity lengths of 20 μm, 30 μm, and 40 μm, and a capillary length of 40 mm, can yield respective cavity length–strain sensitivities of 15.928 nm/με, 25.281 nm/με, and 40.178 nm/με, while its linearity was very close to unity for strain measurements spanning a range in excess of 3500 με. Furthermore, the strain–temperature cross-sensitivity was extremely low.

Inductive Strain Sensor With High Repeatability and Ultra-Low Hysteresis Based on Mechanical Spring

2020 ◽  
Vol 20 (24) ◽  
pp. 14670-14675
Author(s):  
Zhiguang Xing ◽  
Jun Lin ◽  
David McCoul ◽  
Dapeng Zhang ◽  
Jianwen Zhao
Keyword(s):  
Strain Sensor ◽  
Mechanical Spring ◽  
High Repeatability

Novel die-sinking micro-electro discharge machining process using microelectromechanical systems technology

2006 ◽  
Vol 220 (9) ◽  
pp. 1481-1487 ◽  
Author(s):  
J-B Li ◽  
K Jiang ◽  
G J Davies
Keyword(s):  
Microelectromechanical Systems ◽  
Machining Process ◽  
Metallic Surface ◽  
Manufacturing Cost ◽  
Sem Images ◽  
Deep Reactive Ion Etching ◽  
Electro Discharge Machining ◽  
Mems Technology ◽  
Fabrication Condition ◽  
Edm Process

A novel die-sinking micro-electro discharge machining (EDM) process is presented for volume fabrication of metallic microcomponents. In the process, a high-precision silicon electrode is fabricated using deep reactive ion etching (DRIE) process of microelectromechanical systems (MEMS) technology and then coated with a thin layer of copper to increase the conductivity. The metalized Si electrode is used in the EDM process to manufacture metallic microcomponents by imprinting the electrode onto a flat metallic surface. The two main advantages of this process are that it enables the fabrication of metallic microdevices and reduces manufacturing cost and time. The development of the new EDM process is described. A silicon component was produced using the Surface Technology Systems plasma etcher and the DRIE process. Such components can be manufactured with a precision in nanometres. The minimum feature of the component is 50 μm. In the experiments, the Si component was coated with copper and then used as the electrode on an EDM machine of 1 μm resolution. In the manufacturing process, 130 V and 0.2 A currents were used for a period of 5 min. The SEM images of the resulting device show clear etched areas, and the electric discharge wave chart indicates a good fabrication condition. The experimental results have been analysed and the new micro-EDM process is found to be able to fabricate 25 μm features.

New Hybrid Methodology for the Development of MEMS Multivariable Sensors

2001 ◽  
Author(s):  
Emily J. Pryputniewicz ◽  
John P. Angelosanto ◽  
Gordon C. Brown ◽  
Cosme Furlong ◽  
Ryszard J. Pryputniewicz
Keyword(s):  
Process Control ◽  
Microelectromechanical Systems ◽  
Absolute Pressure ◽  
Single Chip ◽  
Specific Test ◽  
Mems Sensor ◽  
Test Conditions ◽  
Mems Technology ◽  
Functional Operation ◽  
Hybrid Methodology

Abstract Using recent advances in microelectromechanical systems (MEMS) technology, a new multivariable sensor was developed. This MEMS sensor, capable of measuring temperature, absolute pressure, and differential pressure on a single chip, is particularly suitable for applications in process control industry. However, functional operation of the sensor depends on validation of its performance under specific test conditions. We have developed a hybrid methodology, based on analysis and measurements, that allows such validation. In this paper, the MEMS multivariable sensor is described, the hybrid methodology is outlined, and its use is illustrated with representative results.

Optical fiber extrinsic Fabry-Perot interferometric strain sensor for multiple strain state measurements

1995 ◽  
Author(s):  
Vikram Bhatia ◽  
Mallika B. Sen ◽  
Kent A. Murphy ◽  
Richard O. Claus ◽  
Mark E. Jones ◽  
...  
Keyword(s):  
Optical Fiber ◽  
Strain State ◽  
Strain Sensor ◽  
Fabry Perot

RF-MEMS Components and Networks for High-Performance Reconfigurable Telecommunication and Wireless Systems

2012 ◽  
Vol 81 ◽  
pp. 65-74 ◽  
Author(s):  
Jacopo Iannacci ◽  
Giuseppe Resta ◽  
Paola Farinelli ◽  
Roberto Sorrentino
Keyword(s):  
High Performance ◽  
Microelectromechanical Systems ◽  
Rf Mems ◽  
Low Cost ◽  
Impedance Matching ◽  
Phase Shifters ◽  
Rf Systems ◽  
Mems Technology ◽  
And Performance ◽  
Rf Performance

MEMS (MicroElectroMechanical-Systems) technology applied to the field of Radio Frequency systems (i.e. RF-MEMS) has emerged in the last 10-15 years as a valuable and viable solution to manufacture low-cost and very high-performance passive components, like variable capacitors, inductors and micro-relays, as well as complex networks, like tunable filters, reconfigurable impedance matching networks and phase shifters, and so on. The availability of such components and their integration within RF systems (e.g. radio transceivers, radars, satellites, etc.) enables boosting the characteristics and performance of telecommunication systems, addressing for instance a significant increase of their reconfigurability. The benefits resulting from the employment of RF-MEMS technology are paramount, being some of them the reduction of hardware redundancy and power consumption, along with the operability of the same RF system according to multiple standards. After framing more in detail the whole context of RF MEMS technology, this paper will provide a brief introduction on a typical RF-MEMS technology platform. Subsequently, some relevant examples of lumped RF MEMS passive elements and complex reconfigurable networks will be reported along with their measured RF performance and characteristics.

scholarly journals Towards a biomimetic gyroscope inspired by the fly's haltere using microelectromechanical systems technology

2014 ◽  
Vol 11 (99) ◽  
pp. 20140573 ◽  
Author(s):  
H. Droogendijk ◽  
R. A. Brookhuis ◽  
M. J. de Boer ◽  
R. G. P. Sanders ◽  
G. J. M. Krijnen
Keyword(s):  
Microelectromechanical Systems ◽  
Damping Ratio ◽  
Fast Response ◽  
Gyroscopic System ◽  
Drive Mode ◽  
Mems Gyroscope ◽  
Coriolis Forces ◽  
Mems Technology ◽  
Large Measurement ◽  
Theoretical Performance

Flies use so-called halteres to sense body rotation based on Coriolis forces for supporting equilibrium reflexes. Inspired by these halteres, a biomimetic gimbal-suspended gyroscope has been developed using microelectromechanical systems (MEMS) technology. Design rules for this type of gyroscope are derived, in which the haltere-inspired MEMS gyroscope is geared towards a large measurement bandwidth and a fast response, rather than towards a high responsivity. Measurements for the biomimetic gyroscope indicate a (drive mode) resonance frequency of about 550 Hz and a damping ratio of 0.9. Further, the theoretical performance of the fly's gyroscopic system and the developed MEMS haltere-based gyroscope is assessed and the potential of this MEMS gyroscope is discussed.

scholarly journals Fabry–Perot Cavity Sensing Probe with High Thermal Stability for an Acoustic Sensor by Structure Compensation

Sensors ◽  
2018 ◽  
Vol 18 (10) ◽  
pp. 3393 ◽  
Author(s):  
Jin Cheng ◽  
Yu Zhou ◽  
Xiaoping Zou
Keyword(s):  
Thermal Stability ◽  
Thermal Expansion ◽  
Cavity Length ◽  
High Reliability ◽  
Simple Approach ◽  
High Thermal Stability ◽  
Acoustic Sensor ◽  
Practical Applications ◽  
Fabry Perot ◽  
Expansion Model

Fiber Fabry–Perot cavity sensing probes with high thermal stability for dynamic signal detection which are based on a new method of structure compensation by a proposed thermal expansion model, are presented here. The model reveals that the change of static cavity length with temperature only depends on the thermal expansion coefficient of the materials and the structure parameters. So, fiber Fabry–Perot cavity sensing probes with inherent temperature insensitivity can be obtained by structure compensation. To verify the method, detailed experiments were carried out. The experimental results reveal that the static cavity length of the fiber Fabry–Perot cavity sensing probe with structure compensation hardly changes in the temperature range of −20 to 60 °C and that the method is highly reproducible. Such a method provides a simple approach that allows the as-fabricated fiber Fabry–Perot cavity acoustic sensor to be used for practical applications, exhibiting the great advantages of its simple architecture and high reliability.

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