scholarly journals On problem of electroelastic wave propagationin trigonometrically graded piezoelectric layer.

2014 ◽  
Vol 67 (1) ◽  
pp. 72-78
Author(s):  
A.A. Kamalyan
Keyword(s):  
Piezoelectric Layer ◽  
Electroelastic Wave

scholarly journals A MEMS Fabrication Process with Thermal-Oxide Releasing Barriers and Polysilicon Sacrificial Layers for AlN Lamb-Wave Resonators to Achieve fs·Qm > 3.42 × 1012

Micromachines ◽  
2021 ◽  
Vol 12 (8) ◽  
pp. 892
Author(s):  
Jicong Zhao ◽  
Zheng Zhu ◽  
Haiyan Sun ◽  
Shitao Lv ◽  
Xingyu Wang ◽  
...  
Keyword(s):  
Resonant Frequency ◽  
Lamb Wave ◽  
Piezoelectric Layer ◽  
Sacrificial Layer ◽  
High Quality ◽  
Micro Electro Mechanical Systems ◽  
Mems Fabrication ◽  
Thermal Oxide ◽  
Series Resonant ◽  
Releasing Process

This paper presents a micro-electro-mechanical systems (MEMS) processing technology for Aluminum Nitride (AlN) Lamb-wave resonators (LWRs). Two LWRs with different frequencies of 402.1 MHz and 2.097 GHz by varying the top interdigitated (IDT) periods were designed and fabricated. To avoid the shortcomings of the uncontrollable etching of inactive areas during the releasing process and to improve the fabrication yield, a thermal oxide layer was employed below the platted polysilicon sacrificial layer, which could define the miniaturized release cavities well. In addition, the bottom Mo electrode that was manufactured had a gentle inclination angle, which could contribute to the growth of the high-quality AlN piezoelectric layer above the Mo layer and effectively prevent the device from breaking. The measured results show that the IDT-floating resonators with 12 μm and 2 μm electrode periods exhibit a motional quality factor (Qm) as high as 4382 and 1633. The series resonant frequency (fs)·Qm values can reach as high as 1.76 × 1012 and 3.42 × 1012, respectively. Furthermore, Al is more suitable as the top IDT material of the AlN LWRs than Au, and can contribute to achieving an excellent electrical performances due to the smaller density, smaller thermo-elastic damping (TED), and larger acoustic impedance difference between Al and AlN.

A penny-shaped crack in a transversely isotropic piezoelectric layer

2001 ◽  
Vol 20 (6) ◽  
pp. 997-1005 ◽  
Author(s):  
Bao-Lin Wang ◽  
Naotake Noda ◽  
Jie-Cai Han ◽  
Shan-Yi Du
Keyword(s):  
Piezoelectric Layer ◽  
Transversely Isotropic ◽  
Penny Shaped Crack ◽  
Shaped Crack

scholarly journals Anti-Plane Shear Crack in a Piezoelectric Layer Bonded to Dissimilar Half Spaces.

1999 ◽  
Vol 42 (1) ◽  
pp. 66-72 ◽  
Author(s):  
Fumio NARITA ◽  
Yasuhide SHINDO ◽  
Koji WATANABE
Keyword(s):  
Piezoelectric Layer ◽  
Shear Crack ◽  
Plane Shear
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