Advanced Replica Transformation & Storage (ARTS) for Fourier Correlation Techniques

2016 ◽  
Author(s):  
Andrew Richardson ◽  
Michael Turner ◽  
David DeCastro Galan ◽  
Michael Batiste
Keyword(s):  
Correlation Techniques

Layout Overlay Techniques to Improve Failure Analysis

1998 ◽  
Author(s):  
Christian Burmer ◽  
Siegfried Görlich ◽  
Siegfried Pauthner
Keyword(s):  
Failure Analysis ◽  
Focused Ion Beam ◽  
New Technologies ◽  
Ion Beam ◽  
Image Correlation ◽  
Microelectronic Devices ◽  
Overlay Technique ◽  
Correlation Techniques ◽  
Navigation Software ◽  
Image Format

Abstract New layout overlay technique has been developed based on standard image correlation techniques to support failure analysis in modern microelectronic devices, which are critical to analyze because they are realized in new technologies using sub-ìm design rules, chemical mechanical polishing techniques (CMP) and autorouted design techniques. As the new technique is realized as an extension of a standard CAD-navigation software and as it makes use of standard image format "TIFF" for data input, which is available at all modern equipments for failure analysis, these technique can be applied to all modern failure analysis methods. Here examples are given for three areas of application: circuit modification using Focused Ion Beam (FIB), support of preparation for backside inspection and fault localization using emission microscopy.

Electromagnetic fluctuations from energetic particles in plasmas

1988 ◽  
Vol 40 (3) ◽  
pp. 407-417 ◽  
Author(s):  
Cheng Chu ◽  
J. L. Sperling
Keyword(s):  
Distribution Function ◽  
Velocity Distribution ◽  
Charged Particles ◽  
Velocity Distribution Function ◽  
Black Body ◽  
Black Body Radiation ◽  
Specific Model ◽  
Magnetized Plasma ◽  
Plasma Power ◽  
Correlation Techniques

Electromagnetic fluctuations, induced by energetic charged particles, are calculated using correlation techniques for a uniform magnetized plasma. Power emission in the ion-cyclotron range of frequencies (ICRF) is calculated for a specific model of velocity distribution function. The emissive spectra are distinct from that of the black-body radiation and have features that are consistent with experimental observation.

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