FABRICATION AND MEASUREMENT OF AN IC-COMPATIBLE GHZ-RANGE PIEZOELECTRIC LONGITUDINAL BAR RESONATOR

2004 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2004.67 ◽

2004 ◽

Author(s):

D.J.D Carter ◽

J.-M. Kang ◽

D.W. White ◽

A.E. Duwel

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