scholarly journals RESONANT MICROCANTILEVER GAS SENSOR FABRICATED IN CMOS TECHNOLOGY FOR THE DETECTION OF CHEMICAL AGENTS

2004 ◽  
Author(s):  
I. Voiculescu ◽  
M. Zaghloul ◽  
R.A. McGill ◽  
E.J. Houser ◽  
S. Stepnowski ◽  
...  
Keyword(s):  
Gas Sensor ◽  
Cmos Technology ◽  
Chemical Agents

scholarly journals Miniaturized Thermal Acoustic Gas Sensor Based on a CMOS Microhotplate and MEMS Microphone

Proceedings ◽  
2020 ◽  
Vol 56 (1) ◽  
pp. 3
Author(s):  
Richard Hopper ◽  
Daniel Popa ◽  
Vasileios Tsoutsouras ◽  
Florin Udrea ◽  
Phillip Stanley-Marbell
Keyword(s):  
Physical Properties ◽  
Gas Sensor ◽  
Conversion Efficiency ◽  
Low Cost ◽  
Cmos Technology ◽  
Gas Detection ◽  
Co2 Gas ◽  
Sensing Mechanism ◽  
Mems Microphone

In this work, we present a novel thermal acoustic gas sensor, fabricated using a CMOS microhotplate and MEMS microphone. The sensing mechanism is based on the detection of changes in the thermal acoustic conversion efficiency which is dependent on the physical properties of the gas. The gas sensor has all the benefits of CMOS technology, including low cost and miniaturization. Here, we demonstrate its application for CO2 gas detection.

Design of an RLC oscillator based on CMOS technology for gas sensor applications

2020 ◽  
Author(s):  
Arantxa A. Arguello-Mora ◽  
Rosa M Woo-Garcia ◽  
Primavera Arguelles-Lucho ◽  
Armando Campos-Dominguez ◽  
A. L. Herrera-May ◽  
...  
Keyword(s):  
Gas Sensor ◽  
Cmos Technology ◽  
Sensor Applications

scholarly journals A Smart Single-Chip Micro-Hotplate-Based Gas Sensor System in CMOS-Technology

2004 ◽  
Vol 39 (3) ◽  
pp. 275-287 ◽  
Author(s):  
Diego Barrettino ◽  
Markus Graf ◽  
Martin Zimmermann ◽  
Christoph Hagleitner ◽  
Andreas Hierlemann ◽  
...  
Keyword(s):  
Gas Sensor ◽  
Cmos Technology ◽  
Sensor System ◽  
Single Chip

Micro-hotplate for thin film gas sensor: fabrication using cmos technology

2005 ◽  
Author(s):  
S.K.H. Fung ◽  
P.C.H. Chan ◽  
J.K.O. Sin ◽  
P.W. Cheung
Keyword(s):  
Thin Film ◽  
Gas Sensor ◽  
Cmos Technology ◽  
Sensor Fabrication

Fully integrated System-On Chip gas sensor in CMOS technology

2013 ◽  
Author(s):  
C. Gamauf ◽  
M. Siegele ◽  
A. Nemecek ◽  
G. C. Mutinati ◽  
S. Steinhauer ◽  
...  
Keyword(s):  
Gas Sensor ◽  
Cmos Technology ◽  
System On Chip ◽  
Integrated System ◽  
Fully Integrated ◽  
On Chip

Micro-hotplate for thin film gas sensor: fabrication using cmos technology

2005 ◽  
Author(s):  
S.K.H. Fung ◽  
P.C.H. Chan ◽  
J.K.O. Sin ◽  
P.W. Cheung
Keyword(s):  
Thin Film ◽  
Gas Sensor ◽  
Cmos Technology ◽  
Sensor Fabrication
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