Closed-Loop Control of a Parallel-Plate Microactuator Beyon the Pull-In Limit
2016 ◽
Vol 244
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pp. 174-183
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2014 ◽
Vol 513-517
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pp. 2947-2953
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2012 ◽
Vol 220
(1)
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pp. 3-9
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2014 ◽
Vol 7
(5)
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pp. 164
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2018 ◽
Vol 2018
(1)
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pp. 176-181
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2019 ◽
Vol 8
(4)
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pp. 1123-1127
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