Understanding Parametric Resonance Effects in Common MEM Actuators
1994 ◽
Vol 264
◽
pp. 343-372
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2014 ◽
Vol 20
(5(90))
◽
pp. 3-26
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Keyword(s):
2009 ◽
Vol 74
(1)
◽
pp. 29-42
◽
Keyword(s):
Keyword(s):