Lithologic logs of Lisburne Group in Lawrence Livermore Laboratory drill holes 1 and 2, Confusion Creek, Chandler Lake Quadrangle, northern Alaska

Preparation of integrated circuits for TEM electromigration in situ studies

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100145753 ◽

1986 ◽

Vol 44 ◽

pp. 882-883

Author(s):

J. V. Maskowitz ◽

W. E. Rhoden ◽

D. R. Kitchen ◽

R. E. Omlor ◽

P. F. Lloyd

Keyword(s):

Integrated Circuits ◽

Crystallographic Orientation ◽

Silicon Wafers ◽

Minimum Size ◽

Test Vehicle ◽

In Situ Studies ◽

Boron Doped ◽

Doped Silicon ◽

Drill Holes

The fabrication of the aluminum bridge test vehicle for use in the crystallographic studies of electromigration involves several photolithographic processes, some common, while others quite unique. It is most important to start with a clean wafer of known orientation. The wafers used are 7 mil thick boron doped silicon. The diameter of the wafer is 1.5 inches with a resistivity of 10-20 ohm-cm. The crystallographic orientation is (111).Initial attempts were made to both drill and laser holes in the silicon wafers then back fill with photoresist or mounting wax. A diamond tipped dentist burr was used to successfully drill holes in the wafer. This proved unacceptable in that the perimeter of the hole was cracked and chipped. Additionally, the minimum size hole realizable was > 300 μm. The drilled holes could not be arrayed on the wafer to any extent because the wafer would not stand up to the stress of multiple drilling.

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Probabilistic evaluation of detection capability of eddy current testing to inspect pitting on a stainless steel clad using multiple signal features

International Journal of Applied Electromagnetics and Mechanics ◽

10.3233/jae-209306 ◽

2020 ◽

Vol 64 (1-4) ◽

pp. 47-55

Author(s):

Takuma Tomizawa ◽

Haicheng Song ◽

Noritaka Yusa

Keyword(s):

Stainless Steel ◽

Eddy Current ◽

Pressure Vessels ◽

Eddy Current Testing ◽

Probability Of Detection ◽

Current Testing ◽

Multiple Signal ◽

Signal Features ◽

Inner Surface ◽

Drill Holes

This study proposes a probability of detection (POD) model to quantitatively evaluate the capability of eddy current testing to detect flaws on the inner surface of pressure vessels cladded by stainless steel and in the presence of high noise level. Welded plate samples with drill holes were prepared to simulate corrosion that typically appears on the inner surface of large-scale pressure vessels. The signals generated by the drill holes and the noise caused by the weld were examined using eddy current testing. A hit/miss-based POD model with multiple flaw parameters and multiple signal features was proposed to analyze the measured signals. It is shown that the proposed model is able to more reasonably characterize the detectability of eddy current signals compared to conventional models that consider a single signal feature.

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