Geologic map and schematic cross section of the Circle Creek rhyolite lekolith, Elko County, Nevada

1968 ◽  
Author(s):  
R.R. Coats
Keyword(s):  
Cross Section ◽  
Geologic Map ◽  
Schematic Cross Section

Geologic map and cross section across the boundary between the Colorado Plateau and the Basin and Range southwest of Bagdad, Arizona

1992 ◽  
Author(s):  
Bruce H. Bryant ◽  
C.M. Conway ◽  
J.E. Spencer ◽  
S.J. Reynolds ◽  
J.K. Otton ◽  
...  
Keyword(s):  
Cross Section ◽  
Colorado Plateau ◽  
Basin And Range ◽  
Geologic Map

Scanning Capacitance Microscopy Application for Bipolar and CMOS Doping Issues in Semiconductor Failure Analysis

2005 ◽  
Author(s):  
Coswin Lin ◽  
Homy Ou ◽  
Chia-Hsing Chao ◽  
Shey-Shi Lu
Keyword(s):  
Failure Analysis ◽  
Failure Mechanism ◽  
Cross Section ◽  
Layer By Layer ◽  
Localization Method ◽  
Scanning Capacitance Microscopy ◽  
Leakage Path ◽  
Schematic Cross Section ◽  
Power Leakage ◽  
Plane View

Abstract Scanning Capacitance Microscopy (SCM) has been extensively used for identifying doping issues in semiconductor failure analysis. In this paper, the root causes of two recent problems -- bipolar beta loss and CMOS power leakage -- were verified using SCM images. Another localization method, layer-by-layer circuit repair with IROBIRCH detection, was also utilized to locate possible defects. The resulting failure mechanism for bipolar beta loss is illustrated with a schematic cross section, which shows the leakage path from the emitter to the base. In the case of CMOS power leakage, the abnormal implantation of the Pwell region was identified with the Plane view SCM image.

Sign in / Sign up

Export Citation Format

Share Document