Measurement of Steady State Pressure Distribution and Dynamic Pressure Fluctuations During Sputtering Process
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2020 ◽
Vol 148
(4)
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pp. 2467-2467
2013 ◽
Vol 135
(6)
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2008 ◽
Vol 123
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pp. 3911-3911
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1983 ◽
Vol 105
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pp. 491-495
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