scholarly journals Nb Thin Films Fabricated by Magnetic Field Distribution Variable-type Facing Target Sputtering System

2011 ◽  
Vol 54 (3) ◽  
pp. 181-183
Author(s):  
Shinichi MOROHASHI ◽  
Yuichi MASUMOTO ◽  
Kozo TANAKA ◽  
Keita USUI ◽  
Eiji KOMATSU
Keyword(s):  
Magnetic Field ◽  
Thin Films ◽  
Field Distribution ◽  
Magnetic Field Distribution ◽  
Variable Type ◽  
Facing Target Sputtering ◽  
Sputtering System

Axial Magnetic Field Distribution Simulation and Optimization in Rotating Magnetron Sputtering System

2014 ◽  
Vol 697 ◽  
pp. 382-387
Author(s):  
Ruo Fan Zhang ◽  
Ren Cheng Wang ◽  
Jia Cheng ◽  
Yi Jia Lu
Keyword(s):  
Magnetic Field ◽  
Magnetron Sputtering ◽  
Field Distribution ◽  
Axial Magnetic Field ◽  
Magnetic Field Distribution ◽  
Simulation And Optimization ◽  
Electromagnetic Coils ◽  
Set Up ◽  
Theoretical Results ◽  
Sputtering System

The primary goal of this study is to optimize the dynamic axial magnetic field distribution in magnetron sputtering system, guiding the target ions to project directly to the substrate. A group of electromagnetic coils were set up to generate an auxiliary axial magnetic field. The configuration of axial magnetic field in different electrifying modes on coils were simulated using numerical integration. Based on the general theoretical results, this paper proposed an optimization of coil arrangement and electrifying modes for a C-shape direct current(DC) magnetron. A 3D model of the coils was set up and the finite element analysis results verified the accuracy of theoretical results. Consequently, this study proposed an arrangement and electrified scheme of electromagnetic coils to provide a dynamic auxiliary axial magnetic field, which could match with the shape and movement of the primary magnetron.

scholarly journals Magnetic field distribution around flux-lines in YBa2Cu3O7 superconducting thin films in a parallel field

2000 ◽  
Vol 276-278 ◽  
pp. 776-777 ◽  
Author(s):  
V Lauter-Pasyuk ◽  
H.J Lauter ◽  
M Lorenz ◽  
A Petrenko ◽  
O Nikonov ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Thin Films ◽  
Field Distribution ◽  
Magnetic Field Distribution ◽  
Superconducting Thin Films ◽  
Flux Lines ◽  
Parallel Field

Magnetic Field Distribution in Aperture of TEM Horn Antenna for Close Proximity RF Immunity Test by Impulsive Excitation Wave

2020 ◽  
Vol 140 (12) ◽  
pp. 601-602
Author(s):  
Gen Kawakami ◽  
Ken Kawamata ◽  
Shinobu Ishigami ◽  
Takeshi Ishida ◽  
Katsushige Harima ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Field Distribution ◽  
Horn Antenna ◽  
Magnetic Field Distribution ◽  
Excitation Wave ◽  
Impulsive Excitation ◽  
Close Proximity ◽  
Tem Horn
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