scholarly journals Fabrication of Ti-Ni Shape Memory Alloy Films by Unbalanced Magnetron Sputtering and Their Joule Heat Induced Shape Memory Behavior

2008 ◽  
Vol 51 (5) ◽  
pp. 312-315 ◽  
Author(s):  
Shozo INOUE ◽  
Takahiro NAMAZU ◽  
Keiji KOTERAZAWA
Keyword(s):  
Shape Memory Alloy ◽  
Magnetron Sputtering ◽  
Shape Memory ◽  
Joule Heat ◽  
Alloy Films ◽  
Shape Memory Behavior ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Thermomechanical behavior of Ti–Ni shape memory alloy films deposited by DC magnetron sputtering

Vacuum ◽  
2006 ◽  
Vol 80 (7) ◽  
pp. 726-731 ◽  
Author(s):  
Takahiro Namazu ◽  
Shozo Inoue ◽  
Akinobu Hashizume ◽  
Keiji Koterazawa
Keyword(s):  
Shape Memory Alloy ◽  
Magnetron Sputtering ◽  
Shape Memory ◽  
Thermomechanical Behavior ◽  
Dc Magnetron Sputtering ◽  
Alloy Films

scholarly journals Shape Memory Alloy Films Manufactured by Magnetron Sputtering

2018 ◽  
Vol 416 ◽  
pp. 012019
Author(s):  
V Bolocan ◽  
R Sprincenatu ◽  
A Novac ◽  
G Chilnicean ◽  
C Craciunescu
Keyword(s):  
Shape Memory Alloy ◽  
Magnetron Sputtering ◽  
Shape Memory ◽  
Alloy Films

Shape Memory Behavior of Ti-Ni-X (X= Pd, Cu) Ternary Alloy Thin Films Prepared by Triple-Source DC Magnetron Sputtering

2010 ◽  
Vol 638-642 ◽  
pp. 2068-2073 ◽  
Author(s):  
Shozo Inoue ◽  
K. Hori ◽  
N. Sawada ◽  
N. Nakamoto ◽  
T. Namazu
Keyword(s):  
Magnetron Sputtering ◽  
Shape Memory ◽  
Ternary Alloy ◽  
Dc Magnetron Sputtering ◽  
Recoverable Strain ◽  
Alloy Films ◽  
Cu Films ◽  
Shape Memory Behavior ◽  
Cu Content ◽  
Transformation Hysteresis

We have deposited the Ti-Ni-X films having various compositions while keeping the Ti content to be ~50at% by means of triple-source dc magnetron sputtering. All of the annealed films showed thermoelastic martensitic transformation. Ms temperature of the Ti-Ni-Pd films increased with increasing Pd content, and the highest Ms temperature of ~180°C was attained for the Ti-23%Ni-27%Pd film. On the other hand, Ms temperature of Ti-Ni-Cu films slightly increases as Cu content increases. The transformation hysteresis is decreased rapidly down to 15~20°C by adding Pd or Cu more than 10at%. Both ternary alloy films showed shape memory behavior during thermal cycling tests under various constant stresses. The critical stress against plastic deformation, c, of the Ti-Ni-Cu films is higher than that of the Ti-Ni-Pd films. The recoverable strain of these ternary alloy films is found to be ~2%. Actuation response by Joule's heat induced shape memory effect of Ti-Ni shape memory alloy films was slightly improved by the addition of Pd or Cu into the alloy.

Ferromagnetic NiMnGa and CoNiGa Shape Memory Alloy Films

2001 ◽  
Vol 687 ◽  
Author(s):  
C. Craciunescu ◽  
Y. Kishi ◽  
L. Saraf ◽  
R. Ramesh ◽  
M. Wuttig
Keyword(s):  
Martensitic Transformation ◽  
Shape Memory Alloy ◽  
Magnetron Sputtering ◽  
Shape Memory ◽  
Spontaneous Magnetization ◽  
Anisotropy Field ◽  
Mechanical Spectroscopy ◽  
Alloy Films ◽  
Silicon Cantilever ◽  
Ferromagnetic Shape Memory

AbstractThis paper reports results on Heusler-type NiMnGa and CoNiGa ferromagnetic shape memory alloy films deposited by magnetron sputtering and pulsed laser deposition respectively, on silicon cantilever-type substrates.NiMnGa FMSMA films deposited by magnetron sputtering on silicon substrates show good ferromagnetic and shape memory properties if the substrate is heated above 350°C or if the films deposited at RT are annealed above 600°C. The growth of the film is columnar. TEM examination shows typical martensitic variants while the SAED pattern suggests an orthorhombic structure. CoNiGa FMSMA films deposited at 550°C by PLD are crystalline. Mechanical spectroscopy data proves the presence of a typical martensitic transformation that develops below room temperature: the phase transitions manifest themselves by typical changes of the modulus defect and displacement vs. temperature characteristics similar to those associated with the martensitic transformation in known shape memory alloy films.The change in the elastic modulus as a function of the magnetic field suggests that in both NiMnGa and CoNiGa films the spontaneous magnetization is clamped by the magnetic anisotropy field.

Electrical properties of ZnO-based photodetector prepared by room temperature DC unbalanced magnetron sputtering

2016 ◽  
Author(s):  
Eka Nurfani ◽  
Angga Virdian ◽  
Robi Kurniawan ◽  
Shibghatullah Muhammady ◽  
Inge M. Sutjahja ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron
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