scholarly journals Low-Temperature Growth Process of Polycrystalline Silicon for Thin Film Transistors.

Shinku ◽  
1994 ◽  
Vol 37 (11) ◽  
pp. 875-880 ◽  
Author(s):  
Tatsuru SHIRAFUJI ◽  
Kunihide TACHIBANA
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Growth Process ◽  
Temperature Growth ◽  
Low Temperature Growth

Reliability of Low Temperature Polycrystalline Silicon Thin-Film Transistors with Ultrathin Gate Oxide

2007 ◽  
Vol 46 (7A) ◽  
pp. 4021-4027 ◽  
Author(s):  
Hitoshi Ueno ◽  
Yuta Sugawara ◽  
Hiroshi Yano ◽  
Tomoaki Hatayama ◽  
Yukiharu Uraoka ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Gate Oxide ◽  
Silicon Thin Film

Possibility of Low Temperature Growth of YBCO Thin Film by Low Energy Ion Assisted Deposition

1993 ◽  
pp. 1001-1004
Author(s):  
Masao Noma ◽  
Masami Nakasone ◽  
Soichi Ogawa ◽  
Tsutom Yotsuya ◽  
Yoshihiko Suzuki
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Low Energy ◽  
Ybco Thin Film ◽  
Temperature Growth ◽  
Low Temperature Growth
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