scholarly journals Special Issue: Characterization of Crystal Growing Surface by "In-Situ Photon-Probing". In Situ Characterization of GaAs and InP Surfaces by Surface Photo-Absorption during Chloride Atomic Layer Epitaxy.

Shinku ◽  
1993 ◽  
Vol 36 (9) ◽  
pp. 708-715
Author(s):  
Kenichi NISHI ◽  
Akira USUI ◽  
Hiroyuki SAKAKI
Keyword(s):  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Special Issue ◽  
In Situ Characterization

Atomic Layer Deposition and in Situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide

2014 ◽  
Vol 118 (48) ◽  
pp. 27749-27753 ◽  
Author(s):  
Alexander C. Kozen ◽  
Alexander J. Pearse ◽  
Chuan-Fu Lin ◽  
Marshall A. Schroeder ◽  
Malachi Noked ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Lithium Hydroxide ◽  
Lithium Oxide ◽  
In Situ Characterization ◽  
Layer Deposition

In situ optical characterization of GaAs and InP surfaces during chloride atomic layer epitaxy

1993 ◽  
Vol 225 (1-2) ◽  
pp. 47-52 ◽  
Author(s):  
Kenichi Nishi ◽  
Akira Usui ◽  
Hiroyuki Sakaki
Keyword(s):  
Atomic Layer ◽  
Optical Characterization ◽  
Atomic Layer Epitaxy

In-situ characterization of Ga2O passivation of In0.53Ga0.47As prior to high-k dielectric atomic layer deposition

2011 ◽  
Vol 99 (4) ◽  
pp. 042904 ◽  
Author(s):  
M. Milojevic ◽  
R. Contreras-Guerrero ◽  
E. O’Connor ◽  
B. Brennan ◽  
P. K. Hurley ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
In Situ Characterization ◽  
Layer Deposition ◽  
High K ◽  
High K Dielectric

In situ characterization of atomic layer deposition processes by a mass spectrometer

1999 ◽  
Vol 09 (PR8) ◽  
pp. Pr8-1021-Pr8-1028 ◽  
Author(s):  
M. Ritala ◽  
M. Juppo ◽  
K. Kukli ◽  
A. Rahtu ◽  
M. Leskelä
Keyword(s):  
Atomic Layer Deposition ◽  
Mass Spectrometer ◽  
Atomic Layer ◽  
In Situ Characterization ◽  
Layer Deposition ◽  
Deposition Processes

In situ characterization of atomic layer deposition of SrTiO3

2001 ◽  
Vol 11 (PR3) ◽  
pp. Pr3-923-Pr3-930 ◽  
Author(s):  
A. Rahtu ◽  
T. Hänninen ◽  
M. Ritala
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
In Situ Characterization ◽  
Layer Deposition

In Situ Characterization of Gas-Phase Species Present During Hafnium Oxide Atomic Layer Deposition

2019 ◽  
Vol 2 (7) ◽  
pp. 133-143 ◽  
Author(s):  
James E. Maslar ◽  
Wilbur Hurst ◽  
Donald Burgess ◽  
William Kimes ◽  
Nhan Nguyen
Keyword(s):  
Atomic Layer Deposition ◽  
Gas Phase ◽  
Hafnium Oxide ◽  
Atomic Layer ◽  
In Situ Characterization ◽  
Layer Deposition
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