scholarly journals The Design of the hydraulic model tests control system based on fuzzy self-adaptive PID algorithm

Author(s):  
Xiafu Lv ◽  
Chen Yong ◽  
Zheng Yongping ◽  
Guo Xinglong
2011 ◽  
Vol 2-3 ◽  
pp. 57-62
Author(s):  
Ying Huang ◽  
Jin Yan Zhao ◽  
Cai Hong Chen ◽  
Yi Chen Zhang

During the reactive sputtering process, due to the hysteresis effect, the sputtering state should be maintained in the transition region of the hysteresis curve which can used to obtain stoichiometric compound films at a high deposition rate. If sputtering state changes, it is impossible to make the sputtering state step back to the original point by manually control the process parameters, because the hysteresis is irreversible. Thus it requires a method of fast feedback to control the sputtering power and the reaction gas flow rate into the chamber. In this paper the PEM (plasma emission monitor) control system and the single neuron self-adaptive PID algorithm have been designed to maintain the sputtering state in proper condition, namely preventing the target from poisoned in the reactive sputtering. The signal acquisition and the controller design were the major parts of the PEM system. The signal acquisition was realized by the optical emission spectrometer. And the single neuron self-adaptive PID controller has been designed in the paper. Using the MATLAB software, the simulation experiments have been done. The output waveforms showed that using traditional non-adaptive PID control algorithm, the overshoot is over 6% and the regulation time is over 1.8s, but using single neuron self-adaptive PID algorithm the overshoot 0 and regulation time 0.5s. Monitoring the target spectral intensity at various reaction gas flow rate, several conclusions could be obtained. The overshoot 6% indicated that the reactive gas flow into the chamber was excessive, the target was poisoned and the sputtering state in chemical mode. And while the overshoot was zero which indicated that the target poisoned was avoided and the reaction ran in defined condition. The PEM using the single neuron self-adaptive PID algorithm responded faster than that using the traditional PID algorithm. The PEM system designed in the paper can effectively avoid the target poisoned and make the reactive sputtering maintain at an ideal state.


2012 ◽  
Vol 19 (8) ◽  
pp. 2179-2186 ◽  
Author(s):  
Biao Yang ◽  
Jin-hui Peng ◽  
Sheng-hui Guo ◽  
Shi-min Zhang ◽  
Wei Li ◽  
...  

2013 ◽  
Vol 846-847 ◽  
pp. 321-324 ◽  
Author(s):  
Le Peng Song ◽  
Hua Bin Wang

As liquid level cascade system has the character the issue of non-linearity ,time variability and the overshoot,tradition PID control can not meet the requirement of precise molding system. So devise a self-_ adaptive fuzzy PID control .A self-_ adaptive fuzzy PID control combined PID to control calculate way and faintness to control the advantage of method, this text permits water tank to carry on mathematics model to design the double permit a water tank liquid misty PID string class control system. Matlab/Simulink and fuzzy logic toolbox are simulated to the single loop PID control system,the cascade control system and the cascade control system based on fuzzy self-tuning PID were simulated with Simulink. The analysis and simulation results indicate that the character issue of non-linearity ,time variability and the overshoot of the liquid level cascade control system based on a self-_ adaptive fuzzy PID controller are superior to previous of two methods.


2018 ◽  
Author(s):  
Miroslaw Kondratiuk ◽  
Leszek Ambroziak ◽  
Ewa Pawluszewicz ◽  
Justyna Janczak

Sign in / Sign up

Export Citation Format

Share Document