A MEMS-based Double-layer Spiral Planar Inductor using Patterned Permalloy filled with Ferrite/Polyimide Composite Materials as Magnetic Layers
Keyword(s):
Keyword(s):
1974 ◽
Vol 32
◽
pp. 546-547
1988 ◽
Vol 46
◽
pp. 1012-1015
Keyword(s):
Keyword(s):