A High-Temperature Optical Sapphire Pressure Sensor For Harsh Environments

2019 ◽  
Author(s):  
Haocheng Zhou ◽  
David A. Mills ◽  
Austin Vera ◽  
Alexandra Garraud ◽  
William Oates ◽  
...  
Keyword(s):  
High Temperature ◽  
Pressure Sensor ◽  
Harsh Environments

scholarly journals A Ceramic Diffusion Bonding Method for Passive LC High-Temperature Pressure Sensor

Sensors ◽  
2018 ◽  
Vol 18 (8) ◽  
pp. 2676
Author(s):  
Chen Li ◽  
Boshan Sun ◽  
Yanan Xue ◽  
Jijun Xiong
Keyword(s):  
High Temperature ◽  
Pressure Sensor ◽  
Pressure Sensors ◽  
Alumina Ceramic ◽  
Harsh Environments ◽  
Ceramic Substrates ◽  
Integrated Technology ◽  
All Ceramic ◽  
Test Platform ◽  
Bonding Method

Alumina ceramic is a highly promising material for fabricating high-temperature pressure sensors. In this paper, a direct bonding method for fabricating a sensitive cavity with alumina ceramic is presented. Alumina ceramic substrates were bonded together to form a sensitive cavity for high-temperature pressure environments. The device can sense pressure parameters at high temperatures. To verify the sensitivity performance of the fabrication method in high-temperature environments, an inductor and capacitor were integrated on the ceramic substrate with the fabricated sensitive cavity to form a wireless passive LC pressure sensor with thick-film integrated technology. Finally, the fabricated sensor was tested using a system test platform. The experimental results show that the sensor can realize pressure measurements above 900 °C, confirming that the fabricated sensitive cavity has excellent sealing properties. Therefore, the direct bonding method can potentially be used for developing all-ceramic high-temperature pressure sensors for application in harsh environments.

scholarly journals A Novel Interdigital Capacitor Pressure Sensor Based on LTCC Technology

2014 ◽  
Vol 2014 ◽  
pp. 1-6 ◽  
Author(s):  
Qiulin Tan ◽  
Mingliang Yang ◽  
Tao Luo ◽  
Wei Liu ◽  
Chao Li ◽  
...  
Keyword(s):  
High Temperature ◽  
Pressure Sensor ◽  
Screen Printing ◽  
Room Temperature ◽  
Mutual Inductance ◽  
Ceramic Technology ◽  
Harsh Environments ◽  
Chemical Corrosion ◽  
Interdigital Capacitor ◽  
Lc Circuit

A novel passive wireless pressure sensor is proposed based on LTCC (low temperature cofired ceramic) technology. The sensor employs a passive LC circuit, which is composed of a variable interdigital capacitor and a constant inductor. The inductor and capacitor were fabricated by screen-printing. Pressure measurement is tested using a wireless mutual inductance coupling method. The experimental sensitivity of the sensor is about 273.95 kHz/bar below 2 bar. Experimental results show that the sensor can be read out wirelessly by external antenna at 600°C. The max readout distance is 3 cm at room temperature. The sensors described can be applied for monitoring of gas pressure in harsh environments, such as environment with high temperature and chemical corrosion.

scholarly journals Hierarchical network enabled flexible textile pressure sensors with ultra-high sensitivity, ultra-wide linearity and high-temperature resistance

2021 ◽  
Author(s):  
Meiling Jia ◽  
Chenghan Yi ◽  
Yankun Han ◽  
Xin Li ◽  
Guoliang Xu ◽  
...  
Keyword(s):  
High Pressure ◽  
High Temperature ◽  
Pressure Sensor ◽  
High Performance ◽  
Full Range ◽  
Pressure Sensors ◽  
Fiber Surface ◽  
High Sensitivity ◽  
Harsh Environments ◽  
Point To Point

Abstract Thin, lightweight, and flexible textile pressure sensors with the ability to precisely detect the full range of faint pressure (< 100 Pa), low pressure (in the range of KPa) and high pressure (in the range of MPa) are in significant demand to meet the requirements for applications in daily activities and more meaningfully in some harsh environments, such as high temperature and high pressure. However, it is still a major challenge to fulfill these requirements simultaneously in a single pressure sensor. Herein, a high-performance pressure sensor enabled by polyimide fiber fabric with functionalized carbon-nanotube (PI/FCNT) is obtained via a facile electrophoretic deposition (EPD) approach. High-density FCNT is evenly wrapped and chemically bonded to the fiber surface during the EPD process, forming a conductive hierarchical fiber/FCNT matrix. Benefiting from the abundant yet firm contacting points, point-to-point contacting mode, and high elastic modulus of both PI and CNT, the proposed PI/FCNT pressure sensor exhibits ultra-high sensitivity (3.57 MPa− 1), ultra-wide linearity (3.24 MPa), exceptionally broad sensing range (~ 45 MPa), and long-term stability (> 4000 cycles). Furthermore, under a high working temperature of 200 ºC, the proposed sensor device still shows an ultra-high sensitivity of 2.64 MPa− 1 within a wide linear range of 7.2 MPa, attributing to its intrinsic high-temperature-resistant properties of PI and CNT. Thanks to these merits, the proposed PI/FCNT(EPD) pressure sensor could serve as an E-skin device to monitor the human physiological information, precisely detect tiny and extremely high pressure, and can be integrated into an intelligent mechanical hand to detect the contact force under high-temperature (> 300 ºC), endowing it with high applicability in the fields of real-time health monitoring, intelligent robots, and harsh environments.

scholarly journals High Temperature Capacitive Pressure Sensor Employing a SiC Based Ring Oscillator

2012 ◽  
Vol 717-720 ◽  
pp. 1215-1218 ◽  
Author(s):  
Roger D. Meredith ◽  
Philip G. Neudeck ◽  
G.E. Ponchak ◽  
Glenn M. Beheim ◽  
M.C. Scardelletti ◽  
...  
Keyword(s):  
High Temperature ◽  
Pressure Sensor ◽  
Logic Gate ◽  
Ring Oscillator ◽  
Harsh Environments ◽  
Capacitive Pressure Sensor ◽  
Sensor Systems ◽  
Aerospace Applications ◽  
Significant Step ◽  
Improved Performance

Smart sensor systems that can operate at high temperatures are required for a range of aerospace applications such as propulsion [1]. For future aerospace propulsion systems to meet the requirements of decreased maintenance, improved performance, and increased safety, the inclusion of intelligence into the propulsion system design and operation is necessary. This implies the development of sensor systems able to operate under the harsh environments present in an engine. Likewise, applications such as Venus exploration missions require systems that can operate in the harsh environments present on the Venus planetary surface. More sensor systems added to the aircraft increases the number of wires and the associated weight, complexity, and potential for failure. Thus, there is a need not only for high temperature sensors and electronics, but also for high temperature wireless technology. This implies the integration of sensors, electronics, wireless circuits, and power into a single system. In this paper, we demonstrate a significant step towards this goal, i.e., for the first time the integration of a pressure sensor with a SiC JFET logic-gate ring oscillator that operates at 500 °C; the sensor output signal is extracted from the small-signal ring oscillation frequency detected at the powersupply end of the DC power wires.

scholarly journals Hierarchical network enabled flexible textile pressure sensor with ultra-broad response range and high-temperature resistance

2021 ◽  
Author(s):  
Meiling Jia ◽  
Chenghan Yi ◽  
Yankun Han ◽  
Xin Li ◽  
Guoliang Xu ◽  
...  
Keyword(s):  
High Pressure ◽  
High Temperature ◽  
Pressure Sensor ◽  
Full Range ◽  
Pressure Sensors ◽  
Fiber Surface ◽  
Harsh Environments ◽  
Temperature Resistance ◽  
High Temperature Resistance ◽  
Fiber Fabric

Abstract Thin, lightweight, and flexible textile pressure sensors with the ability to detect the full range of faint pressure (<100 Pa), low pressure (in the range of KPa) and high pressure (in the range of MPa) are in significant demand to meet the requirements for applications in daily activities and more meaningfully in some harsh environments, such as high temperature and high pressure. However, it is still a significant challenge to fulfill these requirements simultaneously in a single pressure sensor. Herein, a high-performance pressure sensor enabled by polyimide fiber fabric with functionalized carbon-nanotube (PI/FCNT) is obtained via a facile electrophoretic deposition (EPD) approach. High-density FCNT is evenly wrapped and chemically bonded to the fiber surface during the EPD process, forming a conductive hierarchical fiber/FCNT matrix. Benefiting from the large compressible region of PI fiber fabric, abundant yet firm contacting points, point-to-point contacting mode, and high elastic modulus of both PI and CNT, the proposed PI/FCNT pressure sensor can be customized and modulated to achieve both a wide linear ranges, ultra-broad sensing range, long-term stability and high-temperature resistance. Thanks to these merits, the proposed PI/FCNT(EPD) pressure sensor could monitor the human physiological information, detect tiny and extremely high pressure, can be integrated into an intelligent mechanical hand to detect the contact force under high-temperature (>300 ºC), endowing it with high applicability in the fields of real-time health monitoring, intelligent robots, and harsh environments.

scholarly journals Study on the Stability of the Electrical Connection of High-Temperature Pressure Sensor Based on the Piezoresistive Effect of P-Type SiC

Micromachines ◽  
2021 ◽  
Vol 12 (2) ◽  
pp. 216
Author(s):  
Yongwei Li ◽  
Ting Liang ◽  
Cheng Lei ◽  
Qiang Li ◽  
Zhiqiang Li ◽  
...  
Keyword(s):  
High Temperature ◽  
Pressure Sensor ◽  
Pressure Sensors ◽  
Extreme Environment ◽  
Maximum Temperature ◽  
Piezoresistive Effect ◽  
Electrical Connection ◽  
Contact Stability ◽  
The Stability ◽  
P Type

In this study, a preparation method for the high-temperature pressure sensor based on the piezoresistive effect of p-type SiC is presented. The varistor with a positive trapezoidal shape was designed and etched innovatively to improve the contact stability between the metal and SiC varistor. Additionally, the excellent ohmic contact was formed by annealing at 950 °C between Ni/Al/Ni/Au and p-type SiC with a doping concentration of 1018cm−3. The aging sensor was tested for varistors in the air of 25 °C–600 °C. The resistance value of the varistors initially decreased and then increased with the increase of temperature and reached the minimum at ~450 °C. It could be calculated that the varistors at ~100 °C exhibited the maximum temperature coefficient of resistance (TCR) of ~−0.35%/°C. The above results indicated that the sensor had a stable electrical connection in the air environment of ≤600 °C. Finally, the encapsulated sensor was subjected to pressure/depressure tests at room temperature. The test results revealed that the sensor output sensitivity was approximately 1.09 mV/V/bar, which is better than other SiC pressure sensors. This study has a great significance for the test of mechanical parameters under the extreme environment of 600 °C.

GaN-based high-temperature and radiation-hard electronics for harsh environments

2010 ◽  
Author(s):  
Kyung-Ah Son ◽  
Anna Liao ◽  
Gerald Lung ◽  
Manuel Gallegos ◽  
Toshiro Hatake ◽  
...  
Keyword(s):  
High Temperature ◽  
Harsh Environments ◽  
Radiation Hard
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