Fabrication and Characterization of a Flush-Mount MEMS Piezoelectric Dynamic Pressure Sensor and Associated Package for Aircraft Fuselage Arrays

2017 ◽  
Author(s):  
Tiffany Reagan ◽  
Jessica Meloy ◽  
James R. Underbrink ◽  
Mark Sheplak
Keyword(s):  
Pressure Sensor ◽  
Dynamic Pressure ◽  
Aircraft Fuselage ◽  
Fabrication And Characterization

Fabrication and Characterization of a Wireless Bioresorbable Pressure Sensor

2019 ◽  
Vol 4 (9) ◽  
pp. 1900428 ◽  
Author(s):  
Aleksi Palmroth ◽  
Timo Salpavaara ◽  
Jukka Lekkala ◽  
Minna Kellomäki
Keyword(s):  
Pressure Sensor ◽  
Fabrication And Characterization

Fabrication and Characterization of a Hybrid Silicon and Nanocrystalline Diamond Membrane Pressure Sensor

2017 ◽  
Vol 6 (1) ◽  
pp. 41-44 ◽  
Author(s):  
M. Mohr ◽  
A. Behroudj ◽  
N. Wiora ◽  
M. Mertens ◽  
K. Brühne ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Nanocrystalline Diamond ◽  
Fabrication And Characterization ◽  
Hybrid Silicon
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