Energy Coupling in Repetitively Pulsed Nanosecond Dielectric Barrier Discharges in Plane-to-Plane Geometry

Author(s):  
Sharath Nagaraja ◽  
Vigor Yang
Plasma ◽  
2021 ◽  
Vol 4 (2) ◽  
pp. 281-293
Author(s):  
Dariusz Korzec ◽  
Florian Hoppenthaler ◽  
Anatoly Shestakov ◽  
Dominik Burger ◽  
Andrej Shapiro ◽  
...  

The piezoelectric cold plasma generators (PCPG) allow for production of the piezoelectric direct discharge (PDD), which is a kind of cold atmospheric pressure plasma (APP). The subjects of this study are different arrays of PCPGs for large-area treatment of planar substrates. Two limiting factors are crucial for design of such arrays: (i) the parasitic coupling between PCPGs resulting in minimum allowed distance between devices, and (ii) the homogeneity of large area treatment, requiring an overlap of the activation zones resulting from each PCPG. The first limitation is investigated by the use of electric measurements. The minimum distance for operation of 4 cm between two PCPGs is determined by measurement of the energy coupling from an active PCPG to a passive one. The capacitive probe is used to evaluate the interference between signals generated by two neighboring PCPGs. The second limitation is examined by activation image recording (AIR). Two application examples illustrate the compromising these two limiting factors: the treatment of large area planar substrates by PCPG array, and the pretreatment of silicon wafers with an array of PCPG driven dielectric barrier discharges (DBD).


2021 ◽  
Vol 129 (15) ◽  
pp. 153305
Author(s):  
Hui Li ◽  
Chengxun Yuan ◽  
Anatoly Kudryavtsev ◽  
Aleksandr Astafiev ◽  
Evgeny Bogdanov ◽  
...  

2021 ◽  
Vol 42 ◽  
pp. 102175
Author(s):  
Andere Clement Miruka ◽  
Ai Zhang ◽  
Qiancheng Wang ◽  
Dahai Zhu ◽  
Zheng Wang ◽  
...  

2021 ◽  
Vol 18 (4) ◽  
pp. 2000234
Author(s):  
Quan‐Zhi Zhang ◽  
Li Zhang ◽  
De‐Zheng Yang ◽  
Julian Schulze ◽  
You‐Nian Wang ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document