Tunable Diode Laser Absorption Technique Development for Determination of Spatially Resolved Water Concentration and Temperature

2010 ◽  
Author(s):  
Elliott Bryner ◽  
Marc Sharma ◽  
Glenn Diskin ◽  
James McDaniel ◽  
Christopher Goyne ◽  
...  
Keyword(s):  
Diode Laser ◽  
Water Concentration ◽  
Tunable Diode Laser ◽  
Laser Absorption ◽  
Spatially Resolved ◽  
Technique Development ◽  
Diode Laser Absorption ◽  
Absorption Technique

Gaseous Contaminant Measurement for Semiconductor Processing by Diode Laser Spectroscopy

1995 ◽  
Vol 38 (5) ◽  
pp. 22-29
Author(s):  
James McAndrew ◽  
Ronald Inman ◽  
Benjamin Jurcik
Keyword(s):  
Diode Laser ◽  
Fluid Dynamic ◽  
Air Separation ◽  
Tunable Diode Laser ◽  
Laser Absorption ◽  
Diode Laser Spectroscopy ◽  
Diode Laser Absorption ◽  
Gaseous Contaminant

Tunable diode laser absorption spectroscopy (TDLAS) is a novel tool for purity measurement in microelectronic process gases and environments. It is compatible with any matrix gas and extremely sensitive. This paper describes the application of a laboratory TDLAS instrument to measurement of CO, CO2, and H2O with sub-ppb sensitivity, including determination of a CO level of 0.35± 0.2 ppb in nitrogen samples from an air separation plant. Fluid dynamic simulation was used to optimize the design of the cell used for H20 measurements. TDLAS lends itself to the study of contamination sources in situ. As examples, measurements of CO generation in sampling vessels and of CO2 outgassing in an electropolished stainless steel chamber are briefly discussed.

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