scholarly journals Reliability-Based Design Optimization for Shape Design of Compliant Micro-Electro-Mechanical Systems

2006 ◽  
Author(s):  
Brian Adams ◽  
Michael Eldred ◽  
Jonathan Wittwer
Keyword(s):  
Design Optimization ◽  
Mechanical Systems ◽  
Shape Design ◽  
Reliability Based Design Optimization ◽  
Micro Electro Mechanical Systems ◽  
Reliability Based Design

Reliability Based Design Optimization of MEMS Considering Pull-In

2009 ◽  
Vol 131 (6) ◽  
Author(s):  
Michael Raulli ◽  
Kurt Maute
Keyword(s):  
Design Optimization ◽  
Reliability Based Design Optimization ◽  
Micro Electro Mechanical Systems ◽  
Operational Conditions ◽  
Electrostatically Actuated ◽  
Reliability Based Design ◽  
Reliability Method ◽  
Optimization Methodology ◽  
Novel Devices ◽  
Fully Coupled

The increased use of micro-electro-mechanical systems (MEMS) as key components for actuation and sensing purposes in novel devices and systems emphasizes the need for optimal design methods. Stochastic variations in manufacturing and operational conditions must be considered in order to meet performance goals. This study proposes a reliability based design optimization methodology for the design of geometrically complex electrostatically actuated MEMS. The first order reliability method is used for reliability analysis of fully-coupled electrostatic-mechanical problems. A general methodology for predicting the instability phenomenon of pull-in and incorporating it into an automatic optimization process is proposed and verified with analytical and experimental results. The potential of this methodology is illustrated with the design of an analog micromirror.

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