Diaphragm Optimization for a Fiber Optic, High Frequency, High Temperature Micro-Pressure Sensor

2002 ◽  
Author(s):  
Jared Dolatowski ◽  
Jeffrey Kozak
Keyword(s):  
High Temperature ◽  
Pressure Sensor ◽  
High Frequency ◽  
Fiber Optic

Key Technologies Research of MEMS Pressure Sensor for Fuze

2014 ◽  
Vol 472 ◽  
pp. 242-246
Author(s):  
Bo Jiang ◽  
Xing Lin Qi ◽  
Zhi Ning Zhao
Keyword(s):  
High Temperature ◽  
Pressure Sensor ◽  
High Frequency ◽  
Development Trend ◽  
Military Industry ◽  
Key Technology ◽  
Sensor Applications ◽  
Key Technologies ◽  
Mems Technology ◽  
The Development Trend

MEMS technology has been widely used in military industry, in order to further expand the scope of the MEMS pressure sensor applications in military industry, to make fuze development toward miniaturization and intelligent, do the study on special fuze MEMS pressure sensor. Environment of MEMS pressure sensor application in fuze is analyzed, consist service treatment environment and using environment, which can provide indicators for the development of the sensor. The paper analyzes several key technology of the fuze MEMS pressure sensor, including the technique of high temperature resistant, acceleration compensation, leadless, high frequency resistant and overload resistant and so on. To sum up, the continuous development of MEMS technology can make its products meet the use environment of fuze, and the development trend of the fuze also needs the support of MEMS technology, so it is necessary and feasible to carry out the research of the fuze MEMS pressure sensor.

High-Frequency, High-Pressure, Flush Mounted Miniature Liquid Oxygen Fiber-Optic Pressure Sensor

2006 ◽  
Author(s):  
Matthew Palmer ◽  
Matthew Davis ◽  
Robert Fielder ◽  
Clark Boyd ◽  
Marlow Moser ◽  
...  
Keyword(s):  
High Pressure ◽  
Pressure Sensor ◽  
High Frequency ◽  
Fiber Optic ◽  
Liquid Oxygen

Novel High-Temperature Fiber-Optic Pressure Sensor Based on Etched PCF F-P Interferometer Micromachined by a 157-nm Laser

2015 ◽  
Vol 15 (7) ◽  
pp. 3955-3958 ◽  
Author(s):  
Zengling Ran ◽  
Shan Liu ◽  
Qin Liu ◽  
Yanjun Wang ◽  
Haihong Bao ◽  
...  
Keyword(s):  
High Temperature ◽  
Pressure Sensor ◽  
Fiber Optic

High-Temperature Fiber Optic Pressure Sensor

1990 ◽  
Author(s):  
Robert J. Ferina, Jr. ◽  
Valentinas Sernas ◽  
Constantine Polymeropoulos ◽  
George H. Sigel,, Jr.
Keyword(s):  
High Temperature ◽  
Pressure Sensor ◽  
Fiber Optic

scholarly journals All-sapphire-based fiber-optic pressure sensor for high-temperature applications based on wet etching

2021 ◽  
Vol 29 (3) ◽  
pp. 4139
Author(s):  
Zhiqiang Shao ◽  
Yalin Wu ◽  
Shuang Wang ◽  
Chaozhu Zhang ◽  
Zhiqiang Sun ◽  
...  
Keyword(s):  
High Temperature ◽  
Pressure Sensor ◽  
Fiber Optic ◽  
Wet Etching ◽  
Temperature Applications
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