In situ combustion measurements of CO using diode-laser absorption near 2.3 microns

2000 ◽  
Author(s):  
J. Wang ◽  
D. Baer ◽  
R. Hanson ◽  
M. Maiorov ◽  
D. Garbuzov ◽  
...  
Keyword(s):  
Diode Laser ◽  
In Situ Combustion ◽  
Laser Absorption ◽  
Diode Laser Absorption

In situ combustion measurements of CO, CO2, H2O and temperature using diode laser absorption sensors

2000 ◽  
Vol 28 (1) ◽  
pp. 407-413 ◽  
Author(s):  
Michael E. Webber ◽  
Jian Wang ◽  
Scott T. Sanders ◽  
Douglas S. Baer ◽  
Ronald K. Hanson
Keyword(s):  
Diode Laser ◽  
In Situ Combustion ◽  
Laser Absorption ◽  
Diode Laser Absorption

In situ combustion measurements of CO with diode-laser absorption near 23 µm

2000 ◽  
Vol 39 (30) ◽  
pp. 5579 ◽  
Author(s):  
Jian Wang ◽  
Mikhail Maiorov ◽  
Douglas S. Baer ◽  
Dmitri Z. Garbuzov ◽  
John C. Connolly ◽  
...  
Keyword(s):  
Diode Laser ◽  
In Situ Combustion ◽  
Laser Absorption ◽  
Diode Laser Absorption

Gaseous Contaminant Measurement for Semiconductor Processing by Diode Laser Spectroscopy

1995 ◽  
Vol 38 (5) ◽  
pp. 22-29
Author(s):  
James McAndrew ◽  
Ronald Inman ◽  
Benjamin Jurcik
Keyword(s):  
Diode Laser ◽  
Fluid Dynamic ◽  
Air Separation ◽  
Tunable Diode Laser ◽  
Laser Absorption ◽  
Diode Laser Spectroscopy ◽  
Diode Laser Absorption ◽  
Gaseous Contaminant

Tunable diode laser absorption spectroscopy (TDLAS) is a novel tool for purity measurement in microelectronic process gases and environments. It is compatible with any matrix gas and extremely sensitive. This paper describes the application of a laboratory TDLAS instrument to measurement of CO, CO2, and H2O with sub-ppb sensitivity, including determination of a CO level of 0.35± 0.2 ppb in nitrogen samples from an air separation plant. Fluid dynamic simulation was used to optimize the design of the cell used for H20 measurements. TDLAS lends itself to the study of contamination sources in situ. As examples, measurements of CO generation in sampling vessels and of CO2 outgassing in an electropolished stainless steel chamber are briefly discussed.

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