Direct Simulation Monte Carlo Method on Rarefied Hypersonic Gas Flow Around Flat Plates

2004 ◽  
Vol 41 (3) ◽  
pp. 397-405 ◽  
Author(s):  
Noboyuki Tsuboi ◽  
Hiroki Yamaguchi ◽  
Yoichiro Matsumoto
Keyword(s):  
Monte Carlo ◽  
Monte Carlo Method ◽  
Gas Flow ◽  
Direct Simulation Monte Carlo ◽  
Direct Simulation ◽  
Flat Plates ◽  
Simulation Monte Carlo

Study on the Deposition Profile Characteristics in the Micron-Scale Trench Using Direct Simulation Monte Carlo Method

1998 ◽  
Vol 120 (2) ◽  
pp. 296-302 ◽  
Author(s):  
Masato Ikegawa ◽  
Jun’ichi Kobayashi ◽  
Morihisa Maruko
Keyword(s):  
Monte Carlo ◽  
Monte Carlo Method ◽  
Boundary Conditions ◽  
Gas Flow ◽  
Direct Simulation Monte Carlo ◽  
Low Pressure ◽  
Sputter Deposition ◽  
Direct Simulation ◽  
Simulation Monte Carlo ◽  
Profile Characteristics

As integrated circuits are advancing toward smaller device features, step-coverage in submicron trenches and holes in thin film deposition are becoming of concern. Deposition consists of gas flow in the vapor phase and film growth in the solid phase. A deposition profile simulator using the direct simulation Monte Carlo method has been developed to investigate deposition profile characteristics on small trenches which have nearly the same dimension as the mean free path of molecules. This simulator can be applied to several deposition processes such as sputter deposition, and atmospheric- or low-pressure chemical vapor deposition. In the case of low-pressure processes such as sputter deposition, upstream boundary conditions of the trenches can be calculated by means of rarefied gas flow analysis in the reactor. The effects of upstream boundary conditions, molecular collisions, sticking coefficients, and surface migration on deposition profiles in the trenches were clarified.

Direct Simulation Monte Carlo Method for the Simulation of Rarefied Gas Flow in Discrete Track Recording Head/Disk Interfaces

2008 ◽  
Vol 131 (1) ◽  
Author(s):  
Maik Duwensee ◽  
Frank E. Talke ◽  
Shoji Suzuki ◽  
Judy Lin ◽  
David Wachenschwanz
Keyword(s):  
Monte Carlo ◽  
Monte Carlo Method ◽  
Gas Flow ◽  
Rarefied Gas ◽  
Direct Simulation Monte Carlo ◽  
Direct Simulation ◽  
Rarefied Gas Flow ◽  
Recording Head ◽  
Discrete Track ◽  
Simulation Monte Carlo

The direct simulation Monte Carlo method is used to study rarefied gas flow between an inclined plane slider bearing and a nanochannel representing one groove in discrete track recording head/disk interfaces. The forces acting on the slider are determined as a function of slider pitch angle, disk velocity, groove pitch, width, and groove depth. It is found that the influence of manufacturing tolerances on slider forces is smaller for deep and wide grooves than for the case of shallow and narrow grooves.

Simulation of neutral gas flow in a tokamak divertor using the Direct Simulation Monte Carlo method

2014 ◽  
Vol 89 (7-8) ◽  
pp. 1042-1047 ◽  
Author(s):  
Cristian Gleason-González ◽  
Stylianos Varoutis ◽  
Volker Hauer ◽  
Christian Day
Keyword(s):  
Monte Carlo ◽  
Monte Carlo Method ◽  
Gas Flow ◽  
Direct Simulation Monte Carlo ◽  
Direct Simulation ◽  
Neutral Gas ◽  
Simulation Monte Carlo

Direct Simulation Monte Carlo Method for the Simulation of Rarefied Gas Flow in Discrete Track Recording Head/Disk Interfaces

2007 ◽  
Author(s):  
Maik Duwensee ◽  
Shoji Suzuki ◽  
Judy Lin ◽  
David Wachenschwanz ◽  
Frank E. Talke
Keyword(s):  
Monte Carlo ◽  
Monte Carlo Method ◽  
Gas Flow ◽  
Rarefied Gas ◽  
Direct Simulation Monte Carlo ◽  
Direct Simulation ◽  
Rarefied Gas Flow ◽  
Recording Head ◽  
Discrete Track ◽  
Simulation Monte Carlo

The direct simulation Monte Carlo method (DSMC) is used to study rarefied gas flow between an inclined plane slider bearing and a nano channel representing one groove in a discrete track recording head/disk interface. The forces acting on the slider are investigated as a function of slider pitch angle, disk velocity, track pitch, groove width, and groove depth. The influence of the absolute groove size on the slider forces is found to be small.

Sign in / Sign up

Export Citation Format

Share Document