scholarly journals Analysis for Three-Dimensional Anisotropic Elastic Medium with Multi-Layered Elliptic Inclusions under Out-of -Plane Normal Stress

2005 ◽  
Vol 54 (3) ◽  
pp. 326-332 ◽  
Author(s):  
Takeshi TANE ◽  
Ken-ichi HIRASHIMA ◽  
Hiroki HAMANO
Keyword(s):  
Elastic Medium ◽  
Normal Stress ◽  
Three Dimensional ◽  
Anisotropic Elastic Medium ◽  
Plane Normal ◽  
Out Of Plane ◽  
Anisotropic Elastic

Evaluation of the Accuracy of Out-of-Plane Normal Stress Detection Using Novel Piezoresistive CMOS Sensors

2009 ◽  
Author(s):  
Benjamin Lemke ◽  
Rajashree Baskaran ◽  
Oliver Paul
Keyword(s):  
Normal Stress ◽  
Stress Component ◽  
Stress Detection ◽  
Free Surfaces ◽  
Plane Normal ◽  
Uncertainty Sources ◽  
Stress Components ◽  
Normal Stress Component ◽  
Out Of Plane ◽  
The Individual

This paper discusses the measurement opportunities arising from a novel piezoresistance sensor featuring vertical currents. Temperature-compensated measurements of a sum of the three normal stress components including the vertical normal stress, are presented. In specific applications with sensors located at free surfaces where the vertical normal stress component vanishes, a combination of this temperature-compensated measurement and a pseudo-Hall measurement yields the individual in-plane normal stresses. Furthermore, the temperature-uncompensated extraction of the vertical normal stress component is discussed with respect to the new measurement possibilities provided by the presented sensor. A sensitivity analysis illustrates the influence of individual uncertainty sources to the overall uncertainty of the measurement. Based on these results possible improvements in stress detection are suggested.

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