Effects of laser beam lead angle on picosecond laser processing of silicon nitride ceramics

2019 ◽  
Vol 31 (4) ◽  
pp. 042011 ◽  
Author(s):  
Heng Wang ◽  
Xiaoxiao Chen ◽  
Wenwu Zhang
2021 ◽  
Vol 871 ◽  
pp. 277-283
Author(s):  
Chun Yan Yang ◽  
Yun Hao ◽  
Bozhe Wang ◽  
Hai Yuan ◽  
Liu Hui Li

A picosecond laser in spin-cutting mode was used to drill 500μm diameter microholes on 150μm thick aluminium nitride ceramic. The effects of laser processing parameters such as the laser power, scanning speed, and defocus amount on the microhole quality were studied. The results show that as the laser power increases, the inlet and outlet diameters of the holes increase, the taper decreases slightly, and the thickness of the recast layer decreases evidently. The scanning speed has no obvious effect on the diameter and taper of the hole; however, the hole can not be drilled through when the speed is too large. Positive defocus can effectively reduce the taper of the hole. Under 28.5W laser power, 400Hz frequency, 200mm/s scanning speed, and zero defocus amount conditions, high-quality microholes with a taper of 0.85° were obtained.


Author(s):  
Jean-Paul Revel

The last few years have been marked by a series of remarkable developments in microscopy. Perhaps the most amazing of these is the growth of microscopies which use devices where the place of the lens has been taken by probes, which record information about the sample and display it in a spatial from the point of view of the context. From the point of view of the biologist one of the most promising of these microscopies without lenses is the scanned force microscope, aka atomic force microscope.This instrument was invented by Binnig, Quate and Gerber and is a close relative of the scanning tunneling microscope. Today's AFMs consist of a cantilever which bears a sharp point at its end. Often this is a silicon nitride pyramid, but there are many variations, the object of which is to make the tip sharper. A laser beam is directed at the back of the cantilever and is reflected into a split, or quadrant photodiode.


2001 ◽  
Vol 201 (2) ◽  
pp. 238-249 ◽  
Author(s):  
Y. S. Zheng ◽  
K. M. Knowles ◽  
J. M. Vieira ◽  
A. B. Lopes ◽  
F. J. Oliveira

2001 ◽  
Vol 16 (8) ◽  
pp. 2264-2270 ◽  
Author(s):  
Hirokazu Kawaoka ◽  
Tomohiko Adachi ◽  
Tohru Sekino ◽  
Yong-Ho Choa ◽  
Lian Gao ◽  
...  

Highly densed silicon nitride ceramics with various α/β phase ratios were produced by pulse electric current sintering process. The β-phase content of Si3N4 in sintered materials varied from 20 to 100 wt% depending on the sintering condition. The microstructure was observed by scanning electron microscopy and investigated by image analysis. Young's modulus, hardness, fracture toughness, and strength were strongly dependent on the α/β phase ratio. The fracture toughness increased from 4.6 MPa m1/2 for 20-wt% b-phase content to 8.2 MPa m1/2 for 95-wt% β-phase content, and the fracture strength showed a maximum value of about 1.6 GPa at 60-to-80-wt% β-phase content.


1986 ◽  
Vol 2 (3) ◽  
pp. 241
Author(s):  
Akio Sayano ◽  
Shun-ichiro Tanaka ◽  
Kazuo Ikeda

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