Influence of surrounding gas type and pressure condition on micro-drilling of silicon carbide by harmonics of Nd:YAG laser

Author(s):  
Yasuhiro Okamoto ◽  
Shin Urushibata ◽  
Akira Okada ◽  
Tomokazu Sakagawa ◽  
Shin-ichi Nakashiba
2004 ◽  
Vol 818 ◽  
Author(s):  
H. Kawasaki ◽  
Y. Suda ◽  
T. Ohshima ◽  
T. Ueda ◽  
S. Nakashima

AbstractWe have developed a new pulsed laser deposition technique using two Nd:YAG laser beams for the nucleation of silicon carbide (SiC) crystalline nano-particles and single crystalline SiC thin films. Transmission electron microscopy and atomic force microscopy observation suggest that several nanometer size SiC particles can be prepared by the new pulsed laser deposition (PLD) method using two Nd:YAG laser beams (1064nm and 532nm). X ray photoelectron spectroscopy measurements suggest that the silicon/carbon composition ratio of the prepared SiC thin films can be controlled by laser fluence and wavelength.


2004 ◽  
Vol 2004.5 (0) ◽  
pp. 181-182
Author(s):  
Yasuhiro OKAMOTO ◽  
Yoshiyuki UNO ◽  
Shin-ichi NAKASHIBA ◽  
Itaru TANINO ◽  
Norio KATAOKA

2007 ◽  
Author(s):  
G. Alex Newburgh ◽  
M. Dubinskii ◽  
Douglas Merrell
Keyword(s):  

Sign in / Sign up

Export Citation Format

Share Document