Laser-based machining of fine features scales for high precision optical position encoders
2021 ◽
Vol 38
(8)
◽
pp. 567-574
Keyword(s):
1988 ◽
Vol 46
◽
pp. 846-847
1991 ◽
Vol 49
◽
pp. 688-689
Keyword(s):
1995 ◽
Vol 53
◽
pp. 642-643
Keyword(s):
1997 ◽
Vol 400
(1-2)
◽
pp. 7-56
◽
1979 ◽
Vol 40
(C1)
◽
pp. C1-218-C1-220
◽