A multi-kW average power pulsed CO2 laser system using master oscillator – Power amplifier scheme

2000 ◽  
Author(s):  
T. Sakai ◽  
H. Hamamura ◽  
N. Hamada
Keyword(s):  
Power Amplifier ◽  
Co2 Laser ◽  
Laser System ◽  
Average Power ◽  
Master Oscillator ◽  
Master Oscillator Power Amplifier ◽  
Pulsed Co2 Laser

All-fiber high-average power nanosecond-pulsed master-oscillator power amplifier at 2  μm with mJ-level pulse energy

2016 ◽  
Vol 55 (8) ◽  
pp. 1941 ◽  
Author(s):  
Xiong Wang ◽  
Xiaoxi Jin ◽  
Pu Zhou ◽  
Xiaolin Wang ◽  
Hu Xiao ◽  
...  
Keyword(s):  
Power Amplifier ◽  
Pulse Energy ◽  
Average Power ◽  
Master Oscillator ◽  
Master Oscillator Power Amplifier ◽  
High Average Power

Diode-pumped Nd:YLF slab master oscillator power amplifier laser system with 655 mJ output at 50 Hz repetition rate

2015 ◽  
Vol 13 (6) ◽  
pp. 061401-61404 ◽  
Author(s):  
Qi Yang Qi Yang ◽  
Xiaolei Zhu Xiaolei Zhu ◽  
Jian Ma Jian Ma ◽  
Tingting Lu Tingting Lu ◽  
Xiuhua Ma Xiuhua Ma ◽  
...  
Keyword(s):  
Power Amplifier ◽  
Repetition Rate ◽  
Laser System ◽  
Master Oscillator ◽  
Master Oscillator Power Amplifier ◽  
Diode Pumped

Hybrid adaptive optics system for a solid-state zigzag master oscillator power amplifier laser system

2016 ◽  
Vol 14 (9) ◽  
pp. 091402-91405 ◽  
Author(s):  
Boheng Lai Boheng Lai ◽  
Lizhi Dong Lizhi Dong ◽  
Shanqiu Chen Shanqiu Chen ◽  
Guomao Tang Guomao Tang ◽  
Wenjin Liu Wenjin Liu ◽  
...  
Keyword(s):  
Solid State ◽  
Adaptive Optics ◽  
Power Amplifier ◽  
Laser System ◽  
Master Oscillator ◽  
Master Oscillator Power Amplifier ◽  
Adaptive Optics System

Master Oscillator-Power Amplifier carbon monoxide laser system emitting nanosecond pulses

2012 ◽  
Vol 285 (10-11) ◽  
pp. 2707-2714 ◽  
Author(s):  
A.A. Ionin ◽  
I.O. Kinyaevskiy ◽  
Yu.M. Klimachev ◽  
A.A. Kotkov ◽  
A.Yu. Kozlov
Keyword(s):  
Carbon Monoxide ◽  
Power Amplifier ◽  
Laser System ◽  
Master Oscillator ◽  
Master Oscillator Power Amplifier ◽  
Nanosecond Pulses

Dual-Wavelength Master Oscillator Power Amplifier Diode-Laser System at 785 nm

2014 ◽  
Vol 26 (11) ◽  
pp. 1120-1123 ◽  
Author(s):  
Martin Maiwald ◽  
Andreas Klehr ◽  
Bernd Sumpf ◽  
Gotz Erbert ◽  
Gunther Trankle
Keyword(s):  
Diode Laser ◽  
Power Amplifier ◽  
Laser System ◽  
Master Oscillator ◽  
Dual Wavelength ◽  
Master Oscillator Power Amplifier

CO2 laser drives extreme ultraviolet nano-lithography — second life of mature laser technology

2013 ◽  
Vol 21 (4) ◽  
Author(s):  
K. Nowak ◽  
T. Ohta ◽  
T. Suganuma ◽  
J. Fujimoto ◽  
H. Mizoguchi ◽  
...  
Keyword(s):  
Solid State ◽  
Co2 Laser ◽  
Planar Waveguide ◽  
Extreme Ultraviolet ◽  
Quantum Cascade Lasers ◽  
Average Power ◽  
Nonlinear Effects ◽  
Master Oscillator ◽  
Laser Technology ◽  
Pulsed Co2 Laser

AbstractIt was shown both theoretically and experimentally that nanosecond order laser pulses at 10.6 micron wavelength were superior for driving the Sn plasma extreme ultraviolet (EUV) source for nano-lithography for the reasons of higher conversion efficiency, lower production of debris and higher average power levels obtainable in CO2 media without serious problems of beam distortions and nonlinear effects occurring in competing solid-state lasers at high intensities. The renewed interest in such pulse format, wavelength, repetition rates in excess of 50 kHz and average power levels in excess of 18 kiloWatt has sparked new opportunities for a matured multi-kiloWatt CO2 laser technology. The power demand of EUV source could be only satisfied by a Master-Oscillator-Power-Amplifier system configuration, leading to a development of a new type of hybrid pulsed CO2 laser employing a whole spectrum of CO2 technology, such as fast flow systems and diffusion-cooled planar waveguide lasers, and relatively recent quantum cascade lasers. In this paper we review briefly the history of relevant pulsed CO2 laser technology and the requirements for multi-kiloWatt CO2 laser, intended for the laser-produced plasma EUV source, and present our recent advances, such as novel solid-state seeded master oscillator and efficient multi-pass amplifiers built on planar waveguide CO2 lasers.

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