scholarly journals MONTE CARLO SIMULATION OF THE RESPONSE ENERGY DISTRIBUTION OF PROTON RECOIL PROPORTIONAL COUNTERS

2007 ◽  
Author(s):  
Richard Babut ◽  
Vincent Gressier
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Energy Distribution ◽  
Proportional Counters ◽  
Proton Recoil

Estimation of Nanometer-Sized EB Patterning Using Energy Deposition Distribution in Monte Carlo Simulation

2011 ◽  
Vol 497 ◽  
pp. 127-132 ◽  
Author(s):  
Hui Zhang ◽  
Takuro Tamura ◽  
You Yin ◽  
Sumio Hosaka
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Electron Beam ◽  
Energy Distribution ◽  
Electron Energy ◽  
Electron Beam Lithography ◽  
Energy Deposition ◽  
Si Substrate ◽  
Positive Resist

We have studied on theoretical electron energy deposition in thin resist layer on Si substrate for electron beam lithography. We made Monte Carlo simulation to calculate the energy distribution and to consider formation of nanometer sized pattern regarding electron energy, resist thickness and resist type. The energy distribution in 100 nm-thick resist on Si substrate were calculated for small pattern. The calculations show that 4 nm-wide pattern will be formed when resist thickness is less than 30 nm. Furthermore, a negative resist is more suitable than positive resist by the estimation of a shape of the energy distribution.

Energy distribution measurements of transmitted electrons and Monte Carlo simulation for kilovolt electron

1975 ◽  
Vol 8 (7) ◽  
pp. 820-828 ◽  
Author(s):  
R Shimizu ◽  
Y Kataoka ◽  
T Matsukawa ◽  
T Ikuta ◽  
K Murata ◽  
...  
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Energy Distribution

Monte Carlo simulation of xenon filled cylindrical proportional counters

1994 ◽  
Vol 41 (4) ◽  
pp. 984-988 ◽  
Author(s):  
P.J.B.M. Rachinhas ◽  
T.H.V.T. Dias ◽  
F.P. Santos ◽  
A.D. Stauffer ◽  
C.A.N. Conde
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Proportional Counters

scholarly journals Energy resolution of xenon proportional counters: Monte Carlo simulation and experimental results

1996 ◽  
Vol 43 (4) ◽  
pp. 2399-2405 ◽  
Author(s):  
P.J.B.M. Rachinhas ◽  
T.H.V.T. Dias ◽  
A.D. Stauffer ◽  
F.P. Santos ◽  
C.A.N. Conde
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Energy Resolution ◽  
Experimental Results ◽  
Proportional Counters
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