scholarly journals Studi Fabrikasi Isolator Silikon Dioksida (SiO2) Berbasis Lapisan Tipis Menggunakan Teknik Plasma Glow Discharge (Halaman 32 s.d. 35)

2014 ◽  
Vol 17 (50) ◽  
Author(s):  
Sri Agustini Sulandari ◽  
Lely Susita Dwi Murwani

Telah dilakukan penelitian tentang pengaruh parameter plasma oksidasi pada proses pembentukan lapisan tipis isolator silikon dioksida (SiO2) dengan plasma lucutan pijar. Lapisan yang terbentuk  dikarakterisasi sifat elektriknya menggunakan probe empat titik (FPP), sifat struktur mikro, komposisi kimia, maupun pengukuran ketebalan lapisan tipis menggunakan Scanning Electron Microscope (SEM) yang dikopel dengan Energy Dispersive X-Rays Spectroscopy(EDX). Agar proses pembentukan lapisan tipis lebih cepat, silikon harus dietsa/dicuci dengan larutan etsa. Akan tetapi etsa ini berdampak mengubah silikon yang awalnya tipe P menjadi N. Lapisan isolator terbentuk pada temperatur sekitar 5000C, dengan waktu proses hingga 5 jam, yang ditandai dengan resistivitas irisannya E30 (∞) (tahanan tidak terukur). Indikasi terbentuknya lapisan oksida juga diperkuat dari analisis struktur mikro maupun analisis komposisi kimia. Pada kondisi P=1,4 mbar, V=1026 volt, I=725 mA, T= 502 °C, t=5 jam kandungan  Si = 46,74 mass% dan O= 53,26 mass%.  Pada  kondisi tersebut ketebalan lapisan oksida sekitar 0,4 µm

Author(s):  
Marc H. Peeters ◽  
Max T. Otten

Over the past decades, the combination of energy-dispersive analysis of X-rays and scanning electron microscopy has proved to be a powerful tool for fast and reliable elemental characterization of a large variety of specimens. The technique has evolved rapidly from a purely qualitative characterization method to a reliable quantitative way of analysis. In the last 5 years, an increasing need for automation is observed, whereby energy-dispersive analysers control the beam and stage movement of the scanning electron microscope in order to collect digital X-ray images and perform unattended point analysis over multiple locations.The Philips High-speed Analysis of X-rays system (PHAX-Scan) makes use of the high performance dual-processor structure of the EDAX PV9900 analyser and the databus structure of the Philips series 500 scanning electron microscope to provide a highly automated, user-friendly and extremely fast microanalysis system. The software that runs on the hardware described above was specifically designed to provide the ultimate attainable speed on the system.


2014 ◽  
Vol 607 ◽  
pp. 21-24
Author(s):  
Dheerachai Polsongkram ◽  
Pattanasuk Chamninok ◽  
Ki Seok An ◽  
Supakorn Pukird

The morphologies of ZnO nanostructured were synthesized by carbon assisted. The materials source will be prepared by mixing Zn, ZnO and coconut shell charcoal or graphite. The materials source and silicon substrates were put in quartz tube of furnace, heated in difference gases. When, the temperature was cooled down to natural room temperature. The materials sources and silicon substrates will be studied by scanning electron microscope (SEM) and an energy dispersive X-rays instrument (EDX). The results showed that ZnO nanostructures materials such as nanotatrapods, nanowires, nanorods and nanoparticles can be observed.


1973 ◽  
Vol 21 (6) ◽  
pp. 580-586 ◽  
Author(s):  
E. W. DEMPSEY ◽  
F. J. AGATE ◽  
M. LEE ◽  
M. L. PURKERSON

X-ray emission spectra have been recorded from several biologic tissues using a multichannel energy-dispersive analyzer with a retractible semiconductor detector coupled to a Cambridge Mark II scanning electron microscope. Particular attention has been given to the detection of silver in experimental argyria, of calcium in dermoid scales and in experimental necrosis of the kidney and of sulfur in the inner and outer portions of reptilian skin. Sulfur and chlorine have been found associated with silver in argyria. Phosphorus was associated with calcium both in the dermal scales and in necrotic areas. In addition to these elements, trace amounts of copper, zinc, lead, sodium, potassium, iron, arsenic, osmium and uranium have been detected in various normal and experimental situations. The applicability of the combined instrument to cytochemical problems is briefly discussed.


Author(s):  
W. Brünger

Reconstructive tomography is a new technique in diagnostic radiology for imaging cross-sectional planes of the human body /1/. A collimated beam of X-rays is scanned through a thin slice of the body and the transmitted intensity is recorded by a detector giving a linear shadow graph or projection (see fig. 1). Many of these projections at different angles are used to reconstruct the body-layer, usually with the aid of a computer. The picture element size of present tomographic scanners is approximately 1.1 mm2.Micro tomography can be realized using the very fine X-ray source generated by the focused electron beam of a scanning electron microscope (see fig. 2). The translation of the X-ray source is done by a line scan of the electron beam on a polished target surface /2/. Projections at different angles are produced by rotating the object.During the registration of a single scan the electron beam is deflected in one direction only, while both deflections are operating in the display tube.


2013 ◽  
Vol 19 (S2) ◽  
pp. 692-693
Author(s):  
P. Trimby

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.


2021 ◽  
Vol 12 (1) ◽  
pp. 13-18
Author(s):  
Wayan Sujana

Nitridisasi merupakan suatu proses perlakuan panas termokimia yang dimana nitrogen dan amonia didifusikan kepermukaan material (ferro and non-ferro) pada temperatur 500-6000C sehingga membentuk pengerasan kulit akibat terbentuknya lapisan nitrida paduan pada permukaan. Namun pengerasan permukaan ditentukan oleh paduan dari material yang dilakukan proses nitridisasi.Tujuan Nitridisasi adalah untuk memperbaiki ketahanan aus, meningkatkan ketahanan lelah, dan memperbaiki ketahanan tehadap korosi. Proses nitidisasi ini juga dapat mengganti jenis perlakuan panas lain yang menekankan performance yang baik. Pada penelitian ini akan memanfaatkan besi cor nodular yanga akan diproses nitridisasi menggunakan fluidised bed furnace. Pada penelitian ini menggunakan pengujian distribusi kekerasan (metode vickers) untuk mengamati sejauh mana nitrogen berdifusi pada permukaan spesimen, dan pengamatan struktur mikro dengan scanning electron microscope, energy dispersive X-Ray spectroscopy (SEM-EDS).Penelitian ini akan memberikan informasi fenonema proses nitridisasi pada besi cor nodular sehingga mendapatkan suatu analisis yang sesuai dengan metode sehingga menghasilkan kualitas kekerasan permukaan yang baik.


2019 ◽  
Vol 38 (2019) ◽  
pp. 541-546
Author(s):  
Jolanta Romanowska

AbstractThe paper presents results of calorimetric investigation of the Bi-Cu-Sn system by means of differential scanning calorimetry (DSC) at the temperature interval 25-1250∘C, Values of liquidus, solidus and invariant reactions temperatures, as well as melting enthalpies of the selected alloys were determined. Microstructure investigation of the alloys were performed by the use of a scanning electron microscope (SEM) equipped with an energy-dispersive spectrometer (EDS).


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