scholarly journals Development Research on a High-accuracy Measuring System with Six-Degree-of-Freedom Movement Detection.

2002 ◽  
Vol 46 (3) ◽  
pp. 309-323 ◽  
Author(s):  
Eiichi Bando
Keyword(s):  
High Accuracy ◽  
Degree Of Freedom ◽  
Measuring System ◽  
Development Research ◽  
Movement Detection ◽  
Six Degree Of Freedom ◽  
Freedom Movement

Development of a Measuring System for the Measurement of Motions Errors of a Linear Stage

2004 ◽  
Author(s):  
Wen-Yuh Jywe ◽  
Chien-Hung Liu ◽  
Sheng-Chung Tzeng ◽  
Po Chou ◽  
Chu-Wei Lin
Keyword(s):  
Measuring Method ◽  
Degree Of Freedom ◽  
Angular Error ◽  
Measuring System ◽  
Linear Stage ◽  
Process Verification ◽  
Error Components ◽  
Dual Beam ◽  
Six Degree Of Freedom ◽  
Straightness Error

A high precision six-degree-of-freedom measuring system is developed in this paper for the motion measurement of a linear stage. It integrates a miniature dual-beam fiber coupled laser interferometer with the multiple optical paths and quadrant detectors to be capable of measuring six-degree-of-freedom motion errors. The proposed measuring method provides rapid performance, simplicity of setup, and pre-process verification of a linear positioning stage. The experimental setup and algorithm for the error verification are presented in the paper. The measuring range of the proposed measuring system is ±40μm for straightness and 40 arc sec for pitch, roll and yaw. Within the range of ±40μm and 40 arc sec, it has been found that the system’s resolution and accuracy of measuring straightness error components are about 0.04 μm and ±0.06 μm, respectively. The resolution and accuracy of measuring pitch and yaw angular error components are about 0.06 arc sec and ±0.8 arc sec, respectively. The resolution and accuracy of measuring roll angular error are about 0.05 arc sec and ±0.07 arc sec, respectively.

Iterative feedback control based on frequency response model for a six-degree-of-freedom micro-vibration platform

2021 ◽  
pp. 107754632199731
Author(s):  
He Zhu ◽  
Shuai He ◽  
Zhenbang Xu ◽  
XiaoMing Wang ◽  
Chao Qin ◽  
...  
Keyword(s):  
Feedback Control ◽  
Frequency Response ◽  
Control Strategy ◽  
Degree Of Freedom ◽  
Small Displacement ◽  
Response Model ◽  
Parameter Uncertainties ◽  
Micro Vibration ◽  
Six Degree Of Freedom ◽  
Iterative Feedback

In this article, a six-degree-of-freedom (6-DOF) micro-vibration platform (6-MVP) based on the Gough–Stewart configuration is designed to reproduce the 6-DOF micro-vibration that occurs at the installation surfaces of sensitive space-based instruments such as large space optical loads and laser communications equipment. The platform’s dynamic model is simplified because of the small displacement characteristics of micro-vibrations. By considering the multifrequency line spectrum characteristics of micro-vibrations and the parameter uncertainties, an iterative feedback control strategy based on a frequency response model is designed, and the effectiveness of the proposed control strategy is verified by performing integrated simulations. Finally, micro-vibration experiments are performed with a 10 kg load on the platform. The results of these micro-vibration experiments show that after several iterations, the amplitude control errors are less than 3% and the phase control errors are less than 1°. The control strategy presented in this article offers the advantages of a simple algorithm and high precision and it can also be used to control other similar micro-vibration platforms.

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