scholarly journals Laser Ablation. Ablation Using Vacuum-Ultraviolet Lasers.

1997 ◽  
Vol 25 (4) ◽  
pp. 283-287 ◽  
Author(s):  
Koji SUGIOKA ◽  
Satoshi WADA ◽  
Hideo TASHIRO ◽  
Koichi TOYODA
Keyword(s):  
Laser Ablation ◽  
Vacuum Ultraviolet ◽  
Ultraviolet Lasers

Beam Profile Measurement of Vacuum Ultraviolet Lasers with Photostimulable Phosphor

1991 ◽  
Vol 30 (Part 1, No. 11A) ◽  
pp. 2806-2807 ◽  
Author(s):  
Masahito Katto ◽  
Kou Kurosawa ◽  
Wataru Sasaki ◽  
Yasuo Takigawa ◽  
Masahiro Okuda
Keyword(s):  
Vacuum Ultraviolet ◽  
Beam Profile ◽  
Profile Measurement ◽  
Photostimulable Phosphor ◽  
Ultraviolet Lasers

scholarly journals Deposition of fluoropolymer thin films by vacuum-ultraviolet laser ablation.

1994 ◽  
Vol 7 (2) ◽  
pp. 373-380 ◽  
Author(s):  
SHINGO INOUE ◽  
TAKEO FUJII ◽  
YOSHIAKI UENO ◽  
FUMIHITKO KANNARI
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Vacuum Ultraviolet ◽  
Ultraviolet Laser ◽  
Vacuum Ultraviolet Laser

Vacuum Ultraviolet Laser Ablation of Teflon (PTFE)

1992 ◽  
Vol 285 ◽  
Author(s):  
Peter R. Herman ◽  
Boyi Chen ◽  
David J. Moore
Keyword(s):  
Experimental Data ◽  
Laser Ablation ◽  
Computer Model ◽  
Vacuum Ultraviolet ◽  
Ultraviolet Laser ◽  
Swelling Characteristics ◽  
Vacuum Ultraviolet Laser ◽  
193 Nm ◽  
Fluence Range

ABSTRACTVacuum-ultraviolet laser ablation of Teflon is reviewed. The 157 nm irradiation of Teflon produces clean ablation sites well suited to micromachining applications in the electronics and medical fields. At 193 nm, etching profiles are poorly defined, showing swelling characteristics commonly produced by longer wavelength lasers. Comprehensive new 193 nm ablation data are presented showing the first evidence of incubation effects for Teflon. A computer model was developed to include ablation, swelling and incubation processes. The computer results satisfactorily model the experimental data over a large fluence range of 0.6 to 13 J/cm2 with three adjustable parameters.

scholarly journals Radiation Effects of Vacuum Ultraviolet Lasers on Silica Glasses.

1998 ◽  
Vol 11 (2) ◽  
pp. 367-372 ◽  
Author(s):  
Kou Kurosawa ◽  
Peter. R. Herman ◽  
Wataru Sasaki
Keyword(s):  
Radiation Effects ◽  
Vacuum Ultraviolet ◽  
Silica Glasses ◽  
Ultraviolet Lasers

scholarly journals Surface Modification by Superdry Processes with Vacuum Ultraviolet Lasers.

1992 ◽  
Vol 20 (1) ◽  
pp. 11-19 ◽  
Author(s):  
Kou KUROSAWA ◽  
Wataru SASAKI ◽  
Yasuo TAKIGAWA
Keyword(s):  
Surface Modification ◽  
Vacuum Ultraviolet ◽  
Ultraviolet Lasers

scholarly journals Vacuum-Ultraviolet Transparency of Silica Glass and its Interaction with Vacuum-Ultraviolet Lasers.

2002 ◽  
Vol 44 (3) ◽  
pp. 182-188
Author(s):  
Koichi KAJIHARA ◽  
Masahiro HIRANO ◽  
Hideo HOSONO
Keyword(s):  
Silica Glass ◽  
Vacuum Ultraviolet ◽  
Ultraviolet Lasers
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