scholarly journals Development of All Solid State Exciter for High Repetition Rate Excimer Laser.

1996 ◽  
Vol 24 (10) ◽  
pp. 1114-1122
Author(s):  
Fumihiko ENDO ◽  
Katsuya OKAMURA ◽  
Shigeyuki TAKAGI ◽  
Eiji KANEKO
Keyword(s):  
Solid State ◽  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition

5 kHz high repetition rate and high power XeCl excimer laser

1995 ◽  
Vol 66 (11) ◽  
pp. 5162-5164 ◽  
Author(s):  
Tatsumi Goto ◽  
Koji Kakizaki ◽  
Shigeyuki Takagi ◽  
Noboru Okamoto ◽  
Saburo Sato ◽  
...  
Keyword(s):  
Excimer Laser ◽  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Xecl Excimer Laser

High-repetition-rate XeC1 Excimer Laser

1994 ◽  
pp. 199-202
Author(s):  
Saburoh Satoh ◽  
Noboru Okamoto ◽  
Kohji Kakizaki ◽  
Shigeyuki Takagi ◽  
Ken Ishikawa ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition

End-pumped all solid-state high repetition rate Tm,Ho:LuLF laser

2011 ◽  
Vol 9 (2) ◽  
pp. 021401-21403 ◽  
Author(s):  
舒仕江 Shijiang Shu ◽  
余婷 Ting Yu ◽  
侯军燕 Junyan Hou ◽  
刘荣涛 Rongtao Liu ◽  
黄敏捷 Minjie Huang ◽  
...  
Keyword(s):  
Solid State ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition

High-repetition-rate ArF excimer laser for microlithography

2000 ◽  
Author(s):  
Osamu Wakabayashi ◽  
Tatsuo Enami ◽  
Ken Ishii ◽  
Katsutomo Terashima ◽  
Yasuo Itakura ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Arf Excimer Laser
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