Nanomechanics of hard films on compliant substrates.
Keyword(s):
2020 ◽
2003 ◽
Vol 18
(5)
◽
pp. 1275-1283
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2008 ◽
Vol 95
(12)
◽
pp. 6044-6051
◽
Keyword(s):
Keyword(s):
2020 ◽
Vol 170
◽
pp. 105331
Keyword(s):
2013 ◽
Vol 24
(12)
◽
pp. 1730-1737
◽