scholarly journals Finite-volume model for chemical vapor infiltration incorporating radiant heat transfer. Interim report

10.2172/70762 ◽  
1995 ◽  
Author(s):  
A.W. Smith ◽  
T.L. Starr
Keyword(s):  
Heat Transfer ◽  
Finite Volume ◽  
Chemical Vapor ◽  
Radiant Heat ◽  
Chemical Vapor Infiltration ◽  
Radiant Heat Transfer ◽  
Interim Report ◽  
Finite Volume Model ◽  
Volume Model ◽  
Vapor Infiltration

RTP Modeling for CVD and Thermal Oxidation

1994 ◽  
Vol 342 ◽  
Author(s):  
F.Y. Sorrell ◽  
M.J. Fordham ◽  
Seungil Yu ◽  
A.J. Silva Neto
Keyword(s):  
Heat Transfer ◽  
Film Thickness ◽  
Thermal Oxidation ◽  
Process Model ◽  
Gas Flow ◽  
Temporal Distribution ◽  
Chemical Vapor ◽  
Radiant Heat ◽  
Radiant Heat Transfer ◽  
Parallel Diffusion

ABSTRACTA methodology for predicting the spatial and temporal distribution of film thickness is given for Chemical Vapor Deposition (CVD), and for thermal oxidation in Rapid Thermal Processor (RTP) systems, e.g. RTPCVD and RTO. The methodology is based on a wafer thermal model for the heat transfer to, from and within the wafer, a geometric ray trace algorithm to predict the radiant heat transfer from the lamps and reflectors to the wafer, a process model for the deposition or oxidation, and a gas flow model to predict the flow field in the RTP chamber. The CVD process is based on the Arrhenius deposition model, and thermal oxidation is based on a parallel diffusion model. The methodology has been validated by comparison of measured and predicted final film thickness from a cylindrical RTP system. The methodology is based on physical principles, with a minimum reliance on empirical relations and experimental data. As such it can be used for optimization of existing RTP designs and for the evaluation of proposed RTP configurations, such as new or novel lamp, reflector or chamber geometry.

A Finite-Volume Method for Predicting a Radiant Heat Transfer in Enclosures With Participating Media

1990 ◽  
Vol 112 (2) ◽  
pp. 415-423 ◽  
Author(s):  
G. D. Raithby ◽  
E. H. Chui
Keyword(s):  
Heat Transfer ◽  
Finite Volume Method ◽  
Finite Volume ◽  
Radiant Heat ◽  
Computational Grids ◽  
Benchmark Problems ◽  
Radiant Heat Transfer ◽  
Test Results ◽  
Participating Media ◽  
Volume Method

A new “finite-volume” method is proposed to predict radiant heat transfer in enclosures with participating media. The method can conceptually be applied with the same nonorthogonal computational grids used to compute fluid flow and convective heat transfer. A fairly general version of the method is derived, and details are illustrated by applying it to several simple benchmark problems. Test results indicate that good accuracy is obtained on coarse computational grids, and that solution errors diminish rapidly as the grid is refined.

Modeling of Chemical Vapor Infiltration for Pyrocarbon within Capillaries

2016 ◽  
Vol 31 (3) ◽  
pp. 298
Author(s):  
TANG Zhe-Peng ◽  
ZHANG Zhong-Wei ◽  
FANG Jin-Ming ◽  
PENG Yu-Qing ◽  
LI Ai-Jun ◽  
...  
Keyword(s):  
Chemical Vapor ◽  
Chemical Vapor Infiltration ◽  
Vapor Infiltration
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