scholarly journals Development of a polysilicon process based on chemical vapor deposition (Phase 1 and Phase 2). Final report, 6 October 1979-25 June 1982

1982 ◽  
Author(s):  
F. Plahutnik ◽  
A. Arvidson ◽  
D. Sawyer ◽  
K. Sharp
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Phase 1 ◽  
Chemical Vapor ◽  
Final Report ◽  
Phase 2

scholarly journals Chemical Vapor Deposition Growth. Final Report, December 29, 1975 -- August 31, 1977

1978 ◽  
Author(s):  
R. P. Ruth ◽  
H. M. Manasevit ◽  
A. G. Campbell ◽  
R. E. Johnson ◽  
J. L. Kenty ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Final Report ◽  
Chemical Vapor Deposition Growth
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