scholarly journals Determination of ionization fraction and plasma potential in a dc magnetron sputtering system using a quartz crystal microbalance and a gridded energy analyzer

1997 ◽  
Author(s):  
K.M. Green
Keyword(s):  
Magnetron Sputtering ◽  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Plasma Potential ◽  
Energy Analyzer ◽  
Dc Magnetron Sputtering ◽  
Ionization Fraction ◽  
Sputtering System

Direct mass determination of hydrogen uptake using a quartz crystal microbalance

2007 ◽  
Vol 91 (11) ◽  
pp. 113507 ◽  
Author(s):  
Ihor Kulchytskyy ◽  
Martin G. Kocanda ◽  
Tao Xu
Keyword(s):  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Hydrogen Uptake ◽  
Mass Determination

Tunable ion flux density and its impact on AlN thin films deposited in a confocal DC magnetron sputtering system

2018 ◽  
Vol 348 ◽  
pp. 159-167 ◽  
Author(s):  
M. Trant ◽  
M. Fischer ◽  
K. Thorwarth ◽  
S. Gauter ◽  
J. Patscheider ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Flux Density ◽  
Ion Flux ◽  
Dc Magnetron Sputtering ◽  
Sputtering System

scholarly journals Hands-on project aimed at technical education: realizing a dc magnetron sputtering system

2021 ◽  
Author(s):  
Sonny Massahi ◽  
Desiree Ferreira ◽  
Michael Avngaard ◽  
Aksel Christensen ◽  
Daniel Haugbølle ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Technical Education ◽  
Dc Magnetron Sputtering ◽  
Hands On ◽  
Sputtering System

scholarly journals Quartz crystal microbalance determination of trace metal ions in solution

2007 ◽  
Vol 599 (2) ◽  
pp. 275-287 ◽  
Author(s):  
Abdunasser M. Etorki ◽  
A. Robert Hillman ◽  
Karl S. Ryder ◽  
Andrew Glidle
Keyword(s):  
Trace Metal ◽  
Metal Ions ◽  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Trace Metal Ions

Stress and Adhesion Determination of a Wedged Iron Film System by Buckle Morphologies

2012 ◽  
Vol 457-458 ◽  
pp. 113-117
Author(s):  
Hong Zhou ◽  
Sen Jiang Yu ◽  
Yong Ju Zhang ◽  
Miao Gen Chen
Keyword(s):  
Magnetron Sputtering ◽  
Film Thickness ◽  
Glass Substrate ◽  
Silicone Oil ◽  
Adhesion Energy ◽  
Iron Film ◽  
Film System ◽  
Dc Magnetron Sputtering ◽  
Very High

By using the mobile property of silicone oil, a wedged iron (Fe) film system, deposited on glass substrate, has been prepared by dc-magnetron sputtering technique. The wedged Fe film is quenched by the silicone oil during deposition, and therefore contains a very high compressive stress, which is relieved by formation of a large number of telephone cord buckles. Both the buckle width l and maximum buckle deflection δ increase linearly with the film thickness, but the ratio of δ to l (l/δ ) decreases steadily. The internal stress and adhesion energy are estimated in the frame of continuum elastic theory.

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